Browsing by Author "Zekry, Joseph"
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Publication Built-in self-limitation of masked aluminum anodization using photoresist
Proceedings paper2011, Eurosensors XXV, 4/09/2011, p.1633-1636Publication Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
Journal article2013-01, Sensors and Actuators A: Physical, 189, p.218-232Publication Experimental verification of high-NA imaging simulations using SHARP
Publication Fundamental understanding and experimental verification of bright versus dark field imaging
Publication MEMS packaging and reliability: An undividable couple
Journal article2012, Microelectronics Reliability, (52) 9_10, p.2228-2234Publication Thermomechanical design and modeling of porous alumina-based thin film packages for MEMS
Proceedings paper2010-04, 11th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics - EuroSimE, 26/04/2010Publication Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
Oral presentation2012, Wilhelm and Else Heraeus Physics School "Microelectronics for Society - More than Moore expands More Moore"Publication Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes
Proceedings paper2011-06, 16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers, 5/06/2011, p.974-977