Browsing by author "Verhaverbeke, Steven"
Now showing items 1-17 of 17
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A HF vapour etch process for integration in cluster-tool processes: characteristics and applications
Vermeulen, W.J.C.; kwakman, L.F.T.; Werkhoven, C.J.; Granneman, E.H.A.; Verhaverbeke, Steven; Heyns, Marc (1994) -
A new cleaning concept for particle and metal removal on Si surfaces
Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc (1994) -
Analysis of Iddq failures through spectral photon emission microscopy
Rasras, Mahmoud; De Wolf, Ingrid; Bender, Hugo; Groeseneken, Guido; Maes, Herman; Verhaverbeke, Steven; De Pauw, P. (1998) -
Analysis of Iddq failures through spectral photon emission microscopy
Rasras, Mahmoud; De Wolf, Ingrid; Bender, Hugo; Groeseneken, Guido; Maes, Herman; Verhaverbeke, Steven; De Pauw, P. (1998) -
Cleaning technology for highly reliable gate oxides
Heyns, Marc; Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Hatcher, Z.; Gräf, D. (1994) -
Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy
Bender, Hugo; Verhaverbeke, Steven; Heyns, Marc (1994) -
Hydrogen passivation of HF-last cleaned (100) silicon surfaces: a MIR-FTIR study
Bender, Hugo; Verhaverbeke, Steven; Heyns, Marc (1994) -
Modelling of the hydrogen passivation kinetics of Si in dilute HF solutions
Verhaverbeke, Steven; Meuris, Marc; Schmidt, Harald; Mertens, Paul; Heyns, Marc (1994) -
New wet cleaning technology for highly reliable thin oxides
Verhaverbeke, Steven (1994) -
Silicon surface roughening by the decomposition of hydrogen peroxide
Schmidt, Harald; Meuris, Marc; Mertens, Paul; Verhaverbeke, Steven; Heyns, Marc; Hellemans, L.; Snauwaert, J.; Dillenbeck, C. (1994) -
Surface reconstruction of hydrogen annealed (100) silicon
Bender, Hugo; Verhaverbeke, Steven; Caymax, Matty; Vatel, Oliver; Heyns, Marc (1994) -
The etching mechanisms of SiO2 in hydrofluoric acid
Verhaverbeke, Steven; Teerlinck, Ivo; Vinckier, Chris; Stevens, G.; Cartuyvels, Rudi; Heyns, Marc (1994) -
The IMEC Clean concept : an advanced wafer cleaning technology
Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc; Depas, Michel; Philipossian, A.; Vatel, Oliver (1994) -
The relation between sodium and aluminum contamination and dielectric breakdown in MOS structures
Vermeire, Bert; Rotondaro, Antonio; Mertens, Paul; Verhaverbeke, Steven; Heyns, Marc (1994) -
Ultra clean processing technologies: advanced si-surface preparation techniques
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Verhaverbeke, Steven; Hatcher, Z.; Gräf, D. (1994) -
Ultra Clean Processing Technologies: Advanced Si-Surface Preparation Techniques
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Verhaverbeke, Steven; Hatcher, Z.; Gräf, D. (1994) -
Ultra clean processing technology for highly reliable gate oxides
Heyns, Marc; Meuris, Marc; Mertens, Paul; Schmidt, Harald; Verhaverbeke, Steven; Bender, Hugo; Vandervorst, Wilfried; Caymax, Matty; Rotondaro, Antonio; Hatcher, Z.; Gräf, D. (1994)