Browsing by author "Henson, Kirklen"
Now showing items 21-40 of 42
-
Integrating diffusionless anneals into advanced CMOS technologies
Surdeanu, Radu; Lindsay, Richard; Severi, Simone; Satta, Alessandra; Pawlak, Bartek; Lauwers, Anne; Dachs, C.J.J.; Henson, Kirklen; McCoy, S.; Gelpey, J.C. (2004) -
Integration challenges of SPER junctions for the 45 nm technology node
Severi, Simone; Richard, Lindsay; Henson, Kirklen; Pawlak, Bartek; Satta, Alessandra; Duffy, Ray; Surdeanu, Radu (2004) -
Integration of low and high temperature junction anneals for 45nm CMOS
Lindsay, Richard; Pawlak, Bartek; Henson, Kirklen; Satta, Alessandra; Severi, Simone; Lauwers, Anne; Surdeanu, Radu; McCoy, S.; Gelpey, J.; Pagès, Xavier; Maex, Karen (2004) -
Integration of SPER and FUSI in a pFET
Severi, Simone; Pawlak, Bartek; Veloso, Anabela; Duffy, Ray; Kottantharayil, Anil; Lauwers, Anne; Henson, Kirklen; de Marneffe, Jean-Francois; Eyben, Pierre; Vandervorst, Wilfried; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2004) -
Investigation of performance improvement and gate-to-junction leakage reduction fot the 90nm CMOS gate stack architecture
Henson, Kirklen; Kubicek, Stefan; Redolfi, Augusto; De Meyer, Kristin; Jurczak, Gosia; Augendre, Emmanuel (2002) -
Investigation of poly-Si/HfO2 gate stacks in a self-aligned 70nm MOS process flow
Kubicek, Stefan; Chen, Jerry; Ragnarsson, Lars-Ake; Carter, Richard; Kaushik, Vidya; Lujan, Guilherme; Cartier, Eduard; Henson, Kirklen; Pantisano, Luigi; Beckx, Stephan; Jaenen, Patrick; Boullart, Werner; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; De Meyer, Kristin (2003) -
Layout density analysis of FinFETs
Kottantharayil, Anil; Henson, Kirklen; Biesemans, Serge; Collaert, Nadine (2003-09) -
Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)
Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Giangrandi, Simone; Duffy, Ray; Surdeanu, Radu; Vandervorst, Wilfried; Pagès, Xavier; Van der Jeugd, Kees; Stolk, P.; Maex, Karen (2003) -
Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Lindsay, Richard; Henson, Kirklen; Vandervorst, Wilfried; Maex, Karen; Pawlak, Bartek; Duffy, Ray; Surdeanu, Radu; Stolk, Peter; Kittl, Jorge; Giangrandi, Simone; Pagès, Xavier; Van der Jeugd, Kees (2004) -
Limitations of shift-and-ratio based Leff extraction techniques for MOS transistors with halo or pocket implants
van Meer, Hans; Henson, Kirklen; Lyu, Jeong-ho; Rosmeulen, Maarten; Kubicek, Stefan; Collaert, Nadine; De Meyer, Kristin (2000) -
Metal-gate integration challenges
Henson, Kirklen; Jurczak, Gosia (2004) -
Modeling the inversion electron tunneling currents through ultrathin oxides/gate stacks
Govoreanu, Bogdan; Blomme, Pieter; Henson, Kirklen; Van Houdt, Jan; De Meyer, Kristin (2003) -
Ni-silicided deep source/drain junctions formed by solid phase epitaxial regrowth
Lauwers, Anne; Lindsay, Richard; Henson, Kirklen; Severi, Simone; Akheyar, Amal; Pawlak, Bartek; de Potter de ten Broeck, Muriel; Maex, Karen (2004) -
NMOS and PMOS triple gate devices with mid-gap metal gate on oxynitride and Hf based gate dielectrics
Henson, Kirklen; Collaert, Nadine; Demand, Marc; Goodwin, Michael; Brus, Stephan; Rooyackers, Rita; Van Ammel, Annemie; Degroote, Bart; Ercken, Monique; Baerts, Christina; Kottantharayil, Anil; Dixit, Abhisek; Beckx, Stephan; Schram, Tom; Deweerd, Wim; Boullart, Werner; Schaekers, Marc; De Gendt, Stefan; De Meyer, Kristin; Yim, Yong Sik; Hooker, Jacob; Jurczak, Gosia; Biesemans, Serge (2005) -
Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistors
Schram, Tom; Ragnarsson, Lars-Ake; Lujan, Guilherme; Deweerd, Wim; Chen, Jerry; Tsai, Wilman; Henson, Kirklen; Lander, Rob; Hooker, Jacob; Vertommen, Johan; De Meyer, Kristin; De Gendt, Stefan; Heyns, Marc (2005-03) -
Pre-amorphization and co-implantation suitability for advanced PMOS devices integration
Surdeanu, Radu; Pawlak, Bartek; Lindsay, Richard; Van Dal, Mark; Doornbos, Gerben; Dachs, Charles; Ponomarev, Youri; Loo, Josine; Henson, Kirklen; Verheijen, M.; Kaiser, M.; Pagès, Xavier; Jurczak, Gosia; Stolk, Peter (2003) -
Scaling induced drain current degradation for low voltage operation of CMOS technology below 100 nm: impact of non-scalable parameters
Henson, Kirklen; Kubicek, Stefan; De Meyer, Kristin (2000) -
Scaling of Hf-based high-k dielectrics
Heyns, Marc; Beckx, Stephan; Caymax, Matty; Chen, J.; Claes, Martine; Coenegrachts, Bart; De Gendt, Stefan; Degraeve, R.; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Hayashi, Shigenori; Henson, Kirklen; Hooker, Jacob; Houssa, Michel; Kauerauf, Thomas; Kerber, A.; Kwak, Dong Hwa; Lander, Rob; Lujan, Guilherme; Niwa, Masaaki; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Shimamoto, Y.; Tsai, Wilman; Van Elshocht, Sven; Vertommen, Johan; Vandervorst, Wilfried; Kubicek, Stefan (2004) -
Scaling of high-k dielectrics towards sub-1nm EOT
Heyns, Marc; Beckx, Stephan; Bender, Hugo; Blomme, Pieter; Boullart, Werner; Brijs, Bert; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Henson, Kirklen; Kauerauf, Thomas; Kubicek, Stefan; Lucci, Luca; Lujan, Guilherme; Mentens, Jimmy; Pantisano, Luigi; Petry, Jasmine; Richard, Olivier; Röhr, Erika; Schram, Tom; Vandervorst, Wilfried; Van Doorne, Patrick; Van Elshocht, Sven; Westlinder, Jörgen; Witters, Thomas; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Green, Martin; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, Steven; Tsai, Wilman; Young, Edward; Manabe, Yukiko; Shimamoto, Yasuhiro; Bajolet, Philippe; De Witte, Hilde; Maes, Jan; Date, Lucien; Pique, Didier; Coenegrachts, Bart; Vertommen, Johan; Passefort, Sophie (2003) -
SPER junction optimisation in 45nm CMOS devices
Lindsay, Richard; Severi, Simone; Pawlak, Bartek; Henson, Kirklen; Lauwers, Anne; Pagès, Xavier; Satta, Alessandra; Surdeanu, Radu; Lendzian, H.; Maex, Karen (2004)