Browsing by author "Stephenson, Robert"
Now showing items 1-20 of 23
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2D profiling with atomic force microscopy
Trenkler, Thomas; De Wolf, Peter; Stephenson, Robert; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
Hantschel, Thomas; Stephenson, Robert; Trenkler, Thomas; De Wolf, Peter; Vandervorst, Wilfried (1999) -
Contrast reversal in scanning capacitance microscopy imaging
Stephenson, Robert; Verhulst, Anne; De Wolf, Peter; Caymax, Matty; Vandervorst, Wilfried (1998) -
Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques
De Wolf, Peter; Stephenson, Robert; Biesemans, Serge; Jansen, Philippe; Badenes, Gonçal; De Meyer, Kristin; Vandervorst, Wilfried (1998) -
Dopant/carrier profiling for ULSI
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert (1998) -
Electrical scanning probe techniques in semiconductor research
Trenkler, Thomas; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Stephenson, Robert; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Hellemans, L.; Vandervorst, Wilfried; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (1999) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Vandervorst, Wilfried; Hellemans, L.; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (2000) -
Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Hantschel, Thomas; De Wolf, Peter; Trenkler, Thomas; Stephenson, Robert; Vandervorst, Wilfried (1998) -
High resolution dopant/carrier profiling for deep submicron technologies
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; Conard, Thierry; De Witte, Hilde (1999) -
Nanometer scale characterization of deep submicron devices
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert (1999) -
New aspects of nanopotentiometry for complementary metal-oxide-semiconductor transistors
Trenkler, Thomas; Stephenson, Robert; Jansen, Philippe; Vandervorst, Wilfried; Hellemans, L. (2000) -
New aspects of nanopotentiometry for MOSFET transistors
Trenkler, Thomas; Stephenson, Robert; Jansen, Philippe; Vandervorst, Wilfried; Hellemans, L. (1999) -
Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples
Stephenson, Robert; Verhulst, Anne; De Wolf, Peter; Caymax, Matty; Vandervorst, Wilfried (1999) -
Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples
Stephenson, Robert; Verhulst, Anne; De Wolf, Peter; Caymax, Matty; Vandervorst, Wilfried (2000) -
One- and two-dimensional dopant/carrier profiling for ULSI
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; Janssens, Tom (1998) -
Practicalities and limitations of scanning capacitance microscopy for routine IC characterisation
Stephenson, Robert; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Clarysse, Trudo; Jansen, Philippe; Vandervorst, Wilfried (1999) -
Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
Stephenson, Robert; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Clarysse, Trudo; Jansen, Philippe; Vandervorst, Wilfried (2000) -
Probing semiconductor devices on the nanometer schale
Vandervorst, Wilfried; Clarysse, Trudo; Trenkler, Thomas; Hantschel, Thomas; Eyben, Pierre; Haegeman, Bart; Stephenson, Robert; De Wolf, Peter (1999) -
Scanning probe microscopy of 1-D and 2-D carrier distributions
Stephenson, Robert; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Clarysse, Trudo; Vandervorst, Wilfried (1998)