Browsing by author "Mantl, S."
Now showing items 21-30 of 30
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Strained Si-on-insulator for advanced CMOS devices
Mantl, S.; Buca, D.; Zhao, Q.T.; Hollander, B.; Feste, S.; Luysberg, M.; Reiche, M.; Gosele, U.; Buchholtz, W.; Wei, A.; Horstmann, M.; Loo, Roger; Nguyen, Duy (2007) -
Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation
Reiche, M.; Moutanabbir, O.; Himcinschi, C.; Christiansen, S.; Erfurth, E.; Goesele, U.; Mantl, S.; Buca, D.; Zhao, Q. T.; Loo, Roger; Nguyen, Duy; Muster, F.; Petzold, M. (2008) -
Strained silicon-on-insulator : fabrication and characterization
Reiche, M.; Himcinschi, C.; Goesele, U.; Christiansen, S.; Mantl, S.; Buca, D.; Zhao, Q. T.; Feste, S.; Loo, Roger; Nguyen, Duy; Buchholtz, W.; Wei, A.; Horstmann, D.; Feijoo, D.; Storck, P. (2007) -
Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique
Rehman Khan, Aaliya; Stangl, J.; Bauer, G.; Buca, D.; Holländer, B.; Trinkhaus, H.; Mantl, S.; Loo, Roger; Caymax, Matty (2007) -
Tensely strained silicon on SiGe produced by strain transfer
Buca, D.; Holländer, B.; Trinkaus, H.; Mantl, S.; Carius, R.; Loo, Roger; Caymax, Matty; Schaefer, H. (2004-09) -
The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates
Buca, D.; Mörschbächer, M.J.; Holländer, B.; Luysberg, M.; Loo, Roger; Caymax, Matty; Mantl, S. (2004) -
The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices
Mantl, S.; Buca, Dan; Hollander, Bernd; Trinkaus, Helmut; Hueging, Norbert; Luysberg, Martina; Lenk, Steffi; Loo, Roger; Caymax, Matty; Shaefer, Herbert; Reiche, Manfred; Radu, Ionut (2005) -
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing
Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, S.; Hogg, S.M.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Bauer, R. (2003) -
Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation
Hueging, N.; Luysberg, M.; Buca, D.; Hollander, B.; Mantl, S.; Loo, Roger; Caymax, Matty; Urban, K. (2005) -
Untersuchung der Heliumimplantation als Schlüsselprozess in der Relaxtion von pseudomorphischen SiGe/Si Heterostrukturen
Luysberg, M.; Buca, D.; Mantl, S.; Morschbacher, M.; Fichner, P.; Loo, Roger; Caymax, Matty; Urban, K.; Hueging, N. (2004)