Browsing by author "Singh, Arjun"
Now showing items 1-20 of 30
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Challenges for line width / line edge roughness (LWR/lER) improvement in Directed Self-Assembly (DSA) advanced patterning
Chan, BT; Pathangi Sriraman, Hari; Singh, Arjun; El Otell, Ziad; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2015) -
Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Development and evaluation of a-SiC:H films using a dimethylsilacyclopentane precursor as a low -k Cu capping layer in advanced interconnects
Van Besien, Els; Wang, Cong; Verdonck, Patrick; Singh, Arjun; Barbarin, Yohan; Schaekers, Marc; Baklanov, Mikhaïl; Van Elshocht, Sven (2013) -
Development and evaluation of a-SiCO:H films as Cu and moisture diffusion barriers with a low dielectric constant, for advanced interconnects
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Baklanov, Mikhaïl (2013) -
Development of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatterns
Derville, A.; Labrosse, A.; Zimmermann, Y.; Foucher, Johann; Singh, Arjun; Gronheid, Roel (2015) -
Directed self-assembly process integration – fin patterning
Sayan, Safak; Chan, BT; Marzook, Taisir; Vandenbroeck, Nadia; Altamirano Sanchez, Efrain; Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina (2015) -
Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigation
Sayan, Safak; Tao, Zheng; Chan, BT; De Simone, Danilo; Kuwahara, Yuhei; Nafus, Kathleen; Leeson, Michael J.; Gstrein, Florian; Singh, Arjun; Vandenberghe, Geert (2015) -
DSA as a complementary lithography technique for contact hole patterning
Gronheid, Roel; Singh, Arjun; Sayan, Safak; Vandenbroeck, Nadia; Chan, BT; Vandenberghe, Geert (2013) -
Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Loucif Seiad, Mohamed; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Ferhat, Marhoun; Gronheid, Roel (2014) -
Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates
Singh, Arjun; Sayan, Safak; El Otell, Ziad; Chan, BT; Gronheid, Roel (2014) -
Hexagonal hole array patterning for memory applications
Singh, Arjun; Chan, BT; Gronheid, Roel (2015) -
Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
Singh, Arjun; Knaepen, Werner; Sayan, Safak; El Otell, Ziad; Chan, BT; Maes, Jan; Gronheid, Roel (2015) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd (2012) -
Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Dekkers, Harold; Vanstreels, Kris; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Van Elshocht, Sven (2014) -
Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
Singh, Arjun; Nam, Jaewoo; Lee, Jongsu; Chan, BT; Wu, Hengpeng; Yin, Jian; Cao, Yi; Gronheid, Roel (2016) -
Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
Dervillé, A.; Labrosse, A.; Zimmermann, Y.; Foucher, Johann; Gronheid, Roel; Boeckx, Carolien; Singh, Arjun; Leray, Philippe; Halder, Sandip (2016) -
Opportunities and challenges for DSA in logic and memory
Gronheid, Roel; Singh, Arjun; Doise, Jan; Boeckx, Carolien; Karageorgos, Ioannis; Ryckaert, Julien; Pathangi Sriraman, Hari; Rincon Delgadillo, Paulina; Chan, BT; Vandenberghe, Geert (2016) -
Pattern transfer challenges of the Sequential Infiltration Synthesis (SIS) of of Directed Self-Assembly (DSA) for line/space applications
Chan, BT; Singh, Arjun; Luong, Vinh; Parnell, Doni; Yamashita, Fumiko; Gronheid, Roel; de Marneffe, Jean-Francois; Piumi, Daniele (2016) -
Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
Singh, Arjun; Chan, BT; Parnell, Doni; Wu, Hengpeng; Lin, Jian; Cao, Yi; Gronheid, Roel (2015) -
Pillar patterning of Silicon / III-V vertical nanowire FET for 7nm node and beyond
Chan, BT; Tao, Zheng; Altamirano Sanchez, Efrain; Veloso, Anabela; de Marneffe, Jean-Francois; Singh, Arjun (2018)