Browsing by author "Samara, Vladimir"
Now showing items 1-15 of 15
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2D micro-chamber for DC plasma working at low power
Rochus, Veronique; Samara, Vladimir; Vereecke, Bart; Soussan, Philippe; Onsia, Bart; Rottenberg, Xavier (2014) -
A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Samara, Vladimir; Booth, Jean-Paul; de Marneffe, Jean-Francois; Milenin, Alexey; Brouri, Mohand; Boullart, Werner (2012) -
Advanced CMOS manufacturing, a drive for plasma science and technology
de Marneffe, Jean-Francois; Altamirano Sanchez, Efrain; Milenin, Alexey; Samara, Vladimir; Boullart, Werner; Baklanov, Mikhaïl (2012) -
Characterization of CF3I for low-k material etching
Samara, Vladimir; Porter, Stephen; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2013) -
Development of a novel wafer probe for in-situ measurements
El Otell, Ziad; Marinov, Daniil; Bowden, Mark; Samara, Vladimir; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2013) -
Development of a novel wafer-probe for in situ measurements of thin film properties
El Otell, Ziad; Marinov, Daniil; Samara, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas St. J. (2015) -
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma: Modeling and experimental investigation
Samara, Vladimir; Van Laer, Koen; Tinck, Stefan; de Marneffe, Jean-Francois; Bogaerts, Annemie (2013) -
Influence of the ion bombardment of O2 plasmas on low-k materials
Verdonck, Patrick; Samara, Vladimir; Goodyear, Alec; Ferchichi, Abdelkarim; Van Besien, Els; Baklanov, Mikhaïl; Braithwaite, Nicholas (2011) -
Method for in-situ etch uniformity monitoring using plasma emission interferometry
Samara, Vladimir; de Marneffe, Jean-Francois; El Otell, Ziad; Economou, Demetre (2015) -
Modulation of microwave resonance probes
Samara, Vladimir; Bowden, Mark; Braithwaite, Nick (2012) -
Od pijeska do kompjutera (in Serbian; English: From sand to computer)
Samara, Vladimir (2012) -
Planar Langmuir probe in pulsing regime
Samara, Vladimir; Booth, Jean-Paul; de Marneffe, Jean-Francois; Boullart, Werner (2011-05) -
Resistance and capacitance measurements of the films deposited on a planar Langmuir probe
Samara, Vladimir; Brouri, Mohand; de Marneffe, Jean-Francois; Milenin, Alexey; Boullart, Werner (2011-11) -
Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials
El Otell, Ziad; Samara, Vladimir; Zotovich, Alexey; Hansen, Terje; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2015)