Browsing by author "O'Connor, Robert"
Now showing items 1-20 of 29
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A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
Chang, Vincent; Ragnarsson, Lars-Ake; Pourtois, Geoffrey; O'Connor, Robert; Adelmann, Christoph; Van Elshocht, Sven; Delabie, Annelies; Swerts, Johan; Van der Heyden, Nikolaas; Conard, Thierry; Cho, Hag-Ju; Akheyar, Amal; Mitsuhashi, Riichirou; Witters, Thomas; O'Sullivan, Barry; Pantisano, Luigi; Rohr, Erika; Lehnen, Peer; Kubicek, Stefan; Schram, Tom; De Gendt, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping
O'Connor, Robert; Chang, Vincent; Pantisano, Luigi; Ragnarsson, Lars-Ake; Aoulaiche, Marc; O'Sullivan, Barry; Groeseneken, Guido (2008) -
Anomalous positive-bias temperature instability of high-k/metal gate nMOSFET devices with Dy2O3 capping
O'Connor, Robert; Chang, Vincent; Pantisano, Luigi; Ragnarsson, Lars-Ake; Aoulaiche, Marc; O'Sullivan, Barry; Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Yu, HongYu; Groeseneken, Guido (2008) -
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration
Pasquali, Mattia; Brady-Boyd, Anita; Lesniewska, Alicja; Carolan, Patrick; Conard, Thierry; O'Connor, Robert; De Gendt, Stefan; Armini, Silvia (2023) -
Charge trapping in MOSFETs with HfSiON dielectrics during electrical stressing
O'Connor, Robert; Hughes, Greg; Degraeve, Robin; Kaczer, Ben (2005) -
Electron energy dependence of defect generation in high-k gate stacks
O'Connor, Robert; Pantisano, Luigi; Degraeve, Robin; Kauerauf, Thomas; Kaczer, Ben; Roussel, Philippe; Groeseneken, Guido (2007) -
Electron energy dependence of defect generation in high-k gate stacks
O'Connor, Robert; Pantisano, Luigi; Degraeve, Robin; Kauerauf, Thomas; Kaczer, Ben; Roussel, Philippe; Groeseneken, Guido (2008) -
Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
Sahhaf, Sahar; Degraeve, Robin; O'Connor, Robert; Kaczer, Ben; Zahid, Mohammed; Roussel, Philippe; Pantisano, Luigi; Groeseneken, Guido (2009) -
Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films
Kaczer, Ben; Degraeve, Robin; O'Connor, Robert; Roussel, Philippe; Groeseneken, Guido (2004-12) -
Low voltage stress-induced leakage current in 1.4 - 2.1 nm SiON and HfSiON gate dielectric layers
O'Connor, Robert; McDonnell, Stephen; Hughes, Greg; Degraeve, Robin; Kauerauf, Thomas (2005-08) -
Methodologies for sub-1nm EOT TDDB evaluatiion
Kauerauf, Thomas; Degraeve, Robin; Ragnarsson, Lars-Ake; Roussel, Philippe; Sahhaf, Sahar; Groeseneken, Guido; O'Connor, Robert (2011) -
Nucleation and adhesion of ultra-thin copper films on amino-terminated self-assembled monolayers
Bogan, Justin; Brady-Boyd, Anita; Armini, Silvia; Lundy, R.; Selvaraju, V.; O'Connor, Robert (2018) -
On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
Bodgan, Justin; Brady-Boyd, Anita; O'Connor, Robert; Armini, Silvia; Selvaraju, Venkateswaran; Hughes, Greg (2018) -
Oxygen-vacancy-induced Vt shift in La-containing devices
O'Sullivan, Barry; Mitsuhashi, Riichirou; Pourtois, Geoffrey; Chang, Vincent; Adelmann, Christoph; Schram, Tom; Ragnarsson, Lars-Ake; Van der Heyden, Nikolaas; Cho, Hag-Ju; Harada, Y.; Veloso, Anabela; O'Connor, Robert; Pantisano, Luigi; Yu, HongYu; Groeseneken, Guido; Absil, Philippe; Biesemans, Serge; Ikeda, Atsushi; Niwa, Masaaki (2007) -
Reliability of HfSiON gate dielectrics
O'Connor, Robert; Hughes, Greg; Degraeve, Robin; Kaczer, Ben; Kauerauf, Thomas (2005) -
Reliability of thin ZrO2 gate dielectric layers
O'Connor, Robert; Hughes, Greg; Kauerauf, Thomas; Ragnarsson, Lars-Ake (2011) -
SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injection
O'Connor, Robert; Pantisano, Luigi; Degraeve, Robin; Kauerauf, Thomas; Kaczer, Ben; Roussel, Philippe; Groeseneken, Guido (2008) -
Simultaneous extraction of recoverable and permanent components contributing to bias-temperature instability
Grasser, T.; Kaczer, Ben; Hehenberger, P.; Gös, W.; O'Connor, Robert; Reisinger, H.; Gustin, W.; Schlünder, C. (2007) -
Stress induced defect generation implications of doping HfO2 with Al
O'Connor, Robert; Kauerauf, Thomas; Arimura, Hiroaki; Ragnarsson, Lars-Ake (2013) -
Stress induced defect generation implications of doping HfO2 with Al
O'Connor, Robert; Kauerauf, Thomas; Arimura, Hiroaki; Ragnarsson, Lars-Ake (2013)