Browsing by author "Whelan, Caroline"
Now showing items 21-40 of 57
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Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape
Armini, Silvia; Moinpour, Mansour; Whelan, Caroline; Maex, Karen (2007) -
Direct Au and Cu wire bonding on Cu/Low-k BEOL
Banda, Pedro; Ho, Meng; Whelan, Caroline; Lam, Kan Wai; Vath, C.J.; Beyne, Eric (2002) -
Effect of oxygen rf-plasma on electronic properties of CNTs
Felten, Alenxandre; Ghijsen, Jacques; Pireaux, Jean-Jacques; Johnson, Robert L.; Whelan, Caroline; Liang, Duoduo; Van Tendeloo, Gustaaf; Bittencourt, Carla (2007) -
Effect of plasma treatments on a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Celis, Jean-Pierre; Maex, Karen (2005) -
Electrochemistry in microelectronics: interconnects
Carbonell, Laure; Whelan, Caroline (2004) -
Engineering polymer core-silica shell size in the composite abrasives for CMP applications
Armini, Silvia; Whelan, Caroline; Maex, Karen (2008) -
Growth and characterization of atomic layer deposited WCxNy
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, T.; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi, Simone; Brijs, Bert; Jonas, A.M.; Vantomme, A.; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Growth and integration of high-density CNT for BEOL interconnects
Romo Negreira, Ainhoa; Cott, Daire; Verhulst, Anne; Cruz Esconjaurequi, Santiago; Chiodarelli, Nicolo; Ek Weis, Johan; Whelan, Caroline; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan; Vereecken, Philippe (2008) -
Growth mechanism and continuity of atomic layer deposited TiN films on thermal SiO2
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H.; Besling, Wim (2002) -
Growth of carbon nanotubes as horizontal interconnects
Zhang, Can; Cott, Daire; Chiodarelli, Nicolo; Vereecken, Philippe; Robertson, john; Whelan, Caroline (2008) -
In-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding
Whelan, Caroline; Kinsella, M.; Ho, H.M.; Maex, Karen (2004) -
Initial growth mechanism of atomic layer deposited TiN
Satta, Alessandra; Vantomme, Andre; Schuhmacher, Jorg; Whelan, Caroline; Sutcliffe, Victor; Maex, Karen (2004) -
Integration of carbon nanotubes for advanced interconnects
Chiodarelli, Nicolo; Esconjauregui, Santiago Cruz; Romo Negreira, Ainhoa; Cott, Daire; Ek Weis, Johan; Richard, Olivier; Whelan, Caroline; Hantschel, Thomas; Groeseneken, Guido; De Gendt, Stefan; Vereecken, Philippe (2008) -
Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM
Armini, Silvia; Burtovyy, Ruslan; Moinpour, Mansour; Luzinov, Igor; De Messemaeker, Joke; Whelan, Caroline; Maex, Karen (2008) -
Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2007) -
Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2008) -
Kinetic parameters of CO adsorbed on Pt(111) studied by in situ high resolution x-ray photoelectron spectroscopy
Kinne, M.; Fuhrmann, T.; Whelan, Caroline; Zhu, J.F.; Pantforder, J.; Probst, M.; Held, G.; Denecke, R.; Steinruck, H.P. (2002) -
Materials engineering for future interconnects: "catalyst-free" electroless Cu deposition on self-assembly monolayer alternative barriers
Armini, Silvia; Whelan, Caroline (2008) -
Mixed organic/inorganic abrasive particles during oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Molecular engineering of surfaces for future device architectures using SAMs
Maestre Caro, Arantxa; Whelan, Caroline (2009)