Browsing by author "Whelan, Caroline"
Now showing items 41-57 of 57
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Nanoscale indentation of polymer and composite polymer-silica core-shell submicrometer particles by Atomic Force Microscopy
Armini, Silvia; Vakarelski, Ivan; Whelan, Caroline; Maex, Karen; Higashitani, Ko (2007) -
Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
Armini, Silvia; Moinpour, Mansour; Whelan, Caroline; Maex, Karen; Hernandez, Jose Luis (2007) -
Patterning of metallic nanoparticles for the growth of carbon nanotubes
Esconjauregui, Santiago Cruz; Whelan, Caroline; Maex, Karen (2008-02) -
Plasma modification of porous low-k dielectrics
Le, Quoc Toan; Whelan, Caroline; Struyf, Herbert; Bender, Hugo; Conard, Thierry; Brongersma, Sywert; Boullart, Werner; Vanhaelemeersch,; Maex, Karen (2004-09) -
Plasma sealing of a low-k dielectric polymer
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Celis, Jean-Pierre; Maex, Karen (2004) -
Plasma treatments of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jörg; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2003) -
Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.
Le, Quoc Toan; Whelan, Caroline; Struyf, Herbert; Vanhaelemeersch, Serge; Azioune, A.; Louette, P.; Pireaux, J-J; Maex, Karen (2004-10) -
Screening self-assembled monolayers as Cu diffusion barriers
Maestre Caro, Arantxa; Maes, Guido; Borghs, Gustaaf; Whelan, Caroline (2008) -
Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materials
Whelan, Caroline; Cecchet, Francesca; Le, Quoc Toan; Satta, Alessandra; Pireaux, Jean-Jaques; Maex, Karen; Rudolf, Petra (2002) -
Sealing of porous low-k dielectrics: an ellipsometric porosimetry study of UV-O3 oxidized SiOxCy films
Whelan, Caroline; Le, Quoc Toan; Cecchet, Francesca; Satta, Alessandra; Pireaux, Jean-Jacques; Rudolf, Petra; Maex, Karen (2004) -
Self-assembled monolayers as Cu diffusion barriers for advanced interconections: molecular engineering
Maestre Caro, Arantxa; Maes, Guido; Borghs, Gustaaf; Whelan, Caroline (2008) -
Self-assembled monolayers as model substrates for atomic layer deposition
Whelan, Caroline; Demas, Anne-Cécile; Schuhmacher, Jorg; Carbonell, Laure; Maex, Karen (2004) -
Shrinking composite core-shell nanoparticles for CMP
Armini, Silvia; Eslava Fernandez, Salvador; Whelan, Caroline; Terzieva, Valentina; Maex, Karen (2005) -
Surface engineering using self-assembled monolayers: model substrates for atomic-layer deposition
Whelan, Caroline; Demas, Anne-Cécile; Romo Negreira, Ainhoa; Fernandez Landaluce, Tatiana; Schuhmacher, Jorg; Carbonell, Laure; Maex, Karen (2005) -
The removal of copper oxides by ethyl alcohol monitored in situ by spectroscopic ellipsometry
Satta, Alessandra; Shamiryan, Denis; Baklanov, Mikhaïl; Whelan, Caroline; Le, Quoc Toan; Beyer, Gerald; Vantomme, Andre; Maex, Karen (2003) -
Thermal desorption spectrometry as a method of analysis for advanced interconnect materials
Carbonell, Laure; Martin Hoyas, Ana; Whelan, Caroline; Vereecke, Guy (2005) -
Using self-assembled monolayers as model substrates for atomic layer Deposition
Whelan, Caroline; Demas, A.C.; Schuhmacher, Jorg; Maex, Karen (2004)