Browsing by author "Bergmaier, A."

Advanced characterization of high-K materials: a nuclear approach

Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2002)

An (un)solvable problem in SIMS: B-interfacial profiling

Vandervorst, Wilfried; Janssens, Tom; Loo, Roger; Caymax, Matty; Peytier, Ivan; Lindsay, Richard; Fruehauf, Jens; Bergmaier, A.; Dollinger, G. (2003)

Assessment of the near-surface profiling capabilities of SIMS

Vandervorst, Wilfried; Janssens, Tom; Fruehauf, Jens; Ross, I.M.; Cullis, A.; Vandenberg, J.A.; Bergmaier, A.; Dollinger, G. (2003)

Characterization of the B and As pile-up at the Si-SiO2 interface

Fruehauf, Jens; Lindsay, Richard; Vandervorst, Wilfried; Maex, Karen; Bergmaier, A.; Dollinger, G.; Koch, F. (2003)

Characterization of ultra thin oxynitrides, a general approach

Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, I.; Neumaier, P.; Dollinger, G.; Dobeli, M. (1999)

Errors in near-surface and interfacial profiling of boron and arsenic

Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Fruhauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vanden Berg, J.A.; Kimura, K. (2004-06)

Errors in near-surface and interfacial profiling of boron and arsenic

Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Frühauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vandenberg, J.A.; Kimura, K. (2004-05)

High resolution depth profiling of future gate dielectric materials

Bergmaier, A.; Dollinger, G.; Görgens, L.; Neumaier, P.; Bender, Hugo; Brijs, Bert; Conard, Thierry; Houssiau, L. (2003)

High resolution elastic recoil detection

Dollinger, G.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Vandervorst, Wilfried; Jakschik, S. (2004)

Near-surface B/As profiling with SIMS: (in)solvable problems?

Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Fruehauf, Jens; Bergmaier, A.; Dollinger, G.; Vandenberg, J.A. (2003)

Physical characterization of mixed HfAlOx layers by complementary analysis techniques

Bender, Hugo; Conard, Thierry; Richard, Olivier; Brijs, Bert; Petry, Jasmine; Vandervorst, Wilfried; Defranoux, C.; Boher, P.; Rochat, N.; Wyon, C.; Mack, P.; Wolstenholme, J.; Vitchev, E.; Houssiau, L.; Pireaux, J-J.; Bergmaier, A.; Dollinger, G. (2004)

Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques

Bender, Hugo; Conard, Thierry; Richard, Olivier; Brijs, Bert; Petry, Jasmine; Vandervorst, Wilfried; Defranoux, C.; Boher, P.; Rochat, N.; Wyon, C.; Mack, P.; Wolstenholme, J.; Vitchev, R.; Houssiau, L.; Pireaux, J.J.; Bergmaier, A.; Dollinger, G. (2003)

The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD

Brijs, Bert; Giangrandi, Simone; Arstila, K.; Bergmaier, A.; Kimura, K.; Conard, Thierry; Vandervorst, Wilfried; Vantomme, Andre (2005)