Browsing by author "Duffy, Ray"
Now showing items 21-34 of 34
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Influence of the anneal conditions on arsenic activation during solid-phase epitaxial regrowth
Pawlak, Bartek; Duffy, Ray; Janssens, Tom; Vandervorst, Wilfried; Maex, Karen; Smith, A.J.; Cowern, N.E.B; Dao, T.; Tamminga, Y. (2005) -
Integration challenges of SPER junctions for the 45 nm technology node
Severi, Simone; Richard, Lindsay; Henson, Kirklen; Pawlak, Bartek; Satta, Alessandra; Duffy, Ray; Surdeanu, Radu (2004) -
Integration of SPER and FUSI in a pFET
Severi, Simone; Pawlak, Bartek; Veloso, Anabela; Duffy, Ray; Kottantharayil, Anil; Lauwers, Anne; Henson, Kirklen; de Marneffe, Jean-Francois; Eyben, Pierre; Vandervorst, Wilfried; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2004) -
Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing
Severi, Simone; De Meyer, Kristin; Pawlak, Bartek; Duffy, Ray; Kerner, Christoph; McCoy, S.; Gelpey, J.; Selinger, T.; Ragnarsson, Lars-Ake; Absil, Philippe; Biesemans, Serge (2005-10) -
Ion implantation for low-resistive source/drain contacts in FinFET devices
Van Dal, Mark; Duffy, Ray; Pawlak, Bartek; Collaert, Nadine; Jurczak, Gosia; Lander, Rob (2008) -
Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)
Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Giangrandi, Simone; Duffy, Ray; Surdeanu, Radu; Vandervorst, Wilfried; Pagès, Xavier; Van der Jeugd, Kees; Stolk, P.; Maex, Karen (2003) -
Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Lindsay, Richard; Henson, Kirklen; Vandervorst, Wilfried; Maex, Karen; Pawlak, Bartek; Duffy, Ray; Surdeanu, Radu; Stolk, Peter; Kittl, Jorge; Giangrandi, Simone; Pagès, Xavier; Van der Jeugd, Kees (2004) -
Material aspects and challenges for SOI FinFET integration
Van Dal, Mark; Vellianitis, Georgios; Duffy, Ray; Pawlak, Bartek; Lai, Li-Shyue; Hikavyy, Andriy; Collaert, Nadine; Jurczak, Gosia; Lander, Rob (2008) -
Material aspects and challenges for SOI FinFET integration
Van Dal, Mark; Vellianitis, Georgios; Duffy, Ray; Doornbos, Gerben; Pawlak, Bartek; Duriez, Blandine; Lai, Li-Shyue; Hikavyy, Andriy; Vandeweyer, Tom; Demand, Marc; Altamirano Sanchez, Efrain; Rooyackers, Rita; Witters, Liesbeth; Collaert, Nadine; Jurczak, Gosia; Kaiser, M.; Weemaes, R. G. R.; Lander, Rob (2008) -
Performance and leakage optimization in carbon and fluorine C0-implanted pMOSFETs
Pawlak, Bartek; Duffy, Ray; Hooker, Jacob; Hoffmann, Thomas; Felch, S.B.; Eyben, Pierre; Absil, Philippe; Lander, Rob (2008) -
Performance improvement in narrow MuGFETs by gate work function and source/drain implant engineering
Ferain, Isabella; Duffy, Ray; Collaert, Nadine; Van Dal, Mark; Pawlak, Bartek; O'Sullivan, Barry; Witters, Liesbeth; Rooyackers, Rita; Conard, Thierry; Popovici, Mihaela Ioana; Van Elshocht, Sven; Kaiser, M.; Weemaes, R.; Swerts, Johan; Jurczak, Gosia; Lander, Rob; De Meyer, Kristin (2009) -
Probing doping conformality in fin shaped field effect transistor structures using resistors
Vandervorst, Wilfried; Jurczak, Gosia; Everaert, Jean-Luc; Pawlak, B.J.; Duffy, Ray; Del-Agua-Bomiquel, J.I.; Poon, T. (2008) -
Solid phase epitaxy versus random nucleation and growth in sub-20 nm wide fin field-effect transistors
Duffy, Ray; Van Dal, Mark; Pawlak, Bartek; Kaiser, M.; Weemaes, R.G.R.; Degroote, Bart; Kunnen, Eddy; Altamirano Sanchez, Efrain (2007) -
USJ metrology
Vandervorst, Wilfried; Duffy, Ray (2008)