Browsing by imec author "8c38dd5e192a931bf45f91c2074997a23f8a79b1"

28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure

Das, Sayantan; Kisson, Nicola; Mahmud Ul Hasan, Hasan MD; Rynders, Luc; Kljucar, Luka; Halder, Sandip; Leray, Philippe; Dusa, Mircea; Rio, David; Mohsen, Mahmoud; Spence, Chris; De Poortere, Etienne (2021)

A Comparative Study of Deep-Learning Object Detectors for Semiconductor Defect Detection

Dehaerne, Enrique; Dey, Bappaditya; Halder, Sandip (2022)

A new paradigm for in-line detection and control of patterning defects

Hunsche, Stefan; Jochemsen, Marinus; Jain, Vivek; Zhou, Xinjian; Chen, Frank; Vellanki, Venu; Spence, Chris; Halder, Sandip; Van Den Heuvel, Dieter; Truffert, Vincent (2015)

Accuracy assessment between on product and on-optical-target overlay metrology with optical microscopy, SEM and STEM

Abranovitz, Yaniv; Levin, G.; Sarig, L.; Levi, S.; Adan, O.; Tilson, A.; Arjavac, J.; Strauss, M.; Kwakman, L.; Leray, Philippe; Halder, Sandip (2020)

Acoustic cleaning in nano-electronics

Mertens, Paul; Janssens, Tom; Holsteyns, Frank; Zijlstra, Aaldert; Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Hoyer, Ronald; Barbagini, Francesca; Wada, Masayuki; Franklin, Cole; Kim, Tae-Gon; Kim, K; Kenis, Karine; Le, Quoc Toan; Claes, Martine; Kesters, Els; Vos, Rita; Vereecke, Guy; Bearda, Twan; Heyns, Marc (2008)

Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling

Wei, Chih-, I; Kang, Seulki; Das, Sayantan; Oya, Masahiro; Okamoto, Yosuke; Maruyama, Kotaro; Fenger, Germain; Latypov, Azat; Kusnadi, Ir; Khaira, Gurdaman; Yamazaki, Yuichiro; Gillijns, Werner; Halder, Sandip; Lorusso, Gian (2023)

Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery

Alagna, Paolo; Rechtsteiner, G.; Conley, W.; Cross, A.; Sah, K.; Halder, Sandip (2017)

Barium titanate based nano-composite thin films for miniaturized multi-layered ceramic capacitors prepared from nano-particle based novel hybrid solutions

Halder, Sandip; Schneller, Theodor; Waser, Rainer (2011)

BEOL N2: M2 through SAxP process from MP21 to MP26: 193i SAQP vs EUV SADP

Hermans, Yannick; Wu, Chen; Buccheri, Nunzio; Schleicher, Filip; Versluijs, Janko; Montero Alvarez, Daniel; Dey, Bappaditya; Wong, Patrick; Rincon Delgadillo, Paulina; Park, Seongho; Tokei, Zsolt; Leray, Philippe; Halder, Sandip (2023-04-28)

Better prediction on patterning failure mode with hotspot aware OPC modeling

Wei, Chih-I; Wu, Stewart; Deng, Yunfei; Khaira, Gurdaman; Kusnadi, I.; Fenger, G.; Kang, S.; Okamoto, Y.; Maruyama, K.; Yamaszaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner; Lorusso, Gian (2021)

CD-SEM distortion quantification for EPE metrology and contour analysis

Dillen, Harm; Kiers, Ton; Halder, Sandip; Wallow, Thomas I.; Van Roey, Frieda (2017)

Cleaning and damage performance of single wafer cleaning tools using physcial removal forces

Pacco, Antoine; Halder, Sandip; Kenis, Karine; Bearda, Twan; Mertens, Paul (2009)

Cleaning and damage performance of single wafer cleaning tools using physical removal forces

Pacco, Antoine; Halder, Sandip; Kenis, Karine; Bearda, Twan; Mertens, Paul (2009)

Code Generation Using Machine Learning: A Systematic Review

Dehaerne, Enrique; Dey, Bappaditya; Halder, Sandip; De Gendt, Stefan; Meert, Wannes (2022)

Compositional substitutions and aliovalent doping of BaTiO3-based thin films on nickel foils prepared by chemical solution deposition

Bretos, Inigo; Schneller, Theodor; Waser, Rainer; Hennings, Detlef; Halder, Sandip; Thomas, Florian (2010)

Deep learning-based defect detection using large FOV SEM for 28 nm pitch BEOL layer patterned with 0.33NA single exposure EUV

Das, Sayantan; Sah, Kaushik; Liang, Ardis; Roy, Hemanta; Tran, Kha; Babu, Binesh; Hegde, Arjun; Cross, Andrew; Leray, Philippe; Halder, Sandip (2021)