Browsing by author "Rodriguez, Leonard"
Now showing items 1-13 of 13
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Atomic layer deposition of tantalum oxide and tantalum silicate from chloride precursors
Adelmann, Christoph; Delabie, Annelies; Schepers, Bart; Rodriguez, Leonard; Franquet, Alexis; Conard, Thierry; Opsomer, Karl; Vaesen, Inge; Moussa, Alain; Pourtois, Geoffrey; Pierloot, Christine; Caymax, Matty; Van Elshocht, Sven (2012) -
In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS
Rodriguez, Leonard; De Clercq, Astrid; Tallarida, Massimo; Cuypers, Daniel; Locquet, Jean-Pierre; Van Elshocht, Sven; Adelmann, Christoph; Caymax, Matty (2012) -
In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS
Rodriguez, Leonard; De Clercq, Astrid; Tallarida, Massimo; Cuypers, Daniel; Locquet, Jean-Pierre; Van Elshocht, Sven; Adelmann, Christoph; Caymax, Matty (2012) -
In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces
Adelmann, Christoph; Tallarida, Massimo; Cuypers, Daniel; Rodriguez, Leonard; Michling, Marcel; Friedrich, Daniel; De Clercq, Astrid; Delabie, Annelies; Conard, Thierry; Van Elshocht, Sven; Locquet, Jean-Pierre; Schmeisser, Dieter; Caymax, Matty (2012) -
Interface chemistry of Al2O3/III-V upon atomic layer deposition
Tallarida, Massimo; Adelmann, Christoph; Cuypers, Daniel; Rodriguez, Leonard; Lin, Dennis; Michling, Marcel; Friedrich, Daniel; De Clercq, Astrid; Delabie, Annelies; Van Elshocht, Sven; Locquet, Jean-Pierre; Caymax, Matty; Schmeisser, Dieter (2012) -
Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications
Rodriguez, Leonard; Adelmann, Christoph; Sutens, Ben; Winroth, Gustaf; Delabie, Annelies; Gronheid, Roel; Van Elshocht, Sven (2013) -
Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursor
Rodriguez, Leonard; Franquet, Alexis; Brijs, Bert; Tielens, Hilde; Adelmann, Christoph (2012) -
Roughness evolution during the atomic layer deposition of metal oxides
Peter, Antony; Delabie, Annelies; Rodriguez, Leonard; Moussa, Alain; Adelmann, Christoph (2013) -
Study of InP surfaces after wet chemical treatments
Cuypers, Daniel; van Dorp, Dennis; Tallarida, Massimo; Brizzi, Simone; Conard, Thierry; Rodriguez, Leonard; Mees, Maarten; Arnauts, Sophia; Schmeisser, Dieter; Adelmann, Christoph; De Gendt, Stefan (2013) -
Study of InP surfaces after wet chemical treatments
Cuypers, Daniel; van Dorp, Dennis; Tallarida, Massimo; Brizzi, Simone; Rodriguez, Leonard; Conard, Thierry; Arnauts, Sophia; Schmeisser, Dieter; Adelmann, Christoph; De Gendt, Stefan (2013) -
Study of InP surfaces after wet chemical treatments
Cuypers, Daniel; van Dorp, Dennis; Tallarida, Massimo; Brizzi, Simone; Conard, Thierry; Rodriguez, Leonard; Mees, Maarten; Arnauts, Sophia; Schmeisser, Dieter; Adelmann, Christoph; De Gendt, Stefan (2014) -
Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethyl aluminum and water on indium phosphide
Adelmann, Christoph; Cuypers, Daniel; Tallarida, Massimo; Rodriguez, Leonard; De Clercq, Astrid; Friedrich, Daniel; Conard, Thierry; Delabie, Annelies; Seo, Jin Won; Locquet, Jean-Pierre; De Gendt, Stefan; Schmeisser, Dieter; Van Elshocht, Sven; Caymax, Matty (2013) -
Wet chemical etching of InP for cleaning applications: II. Oxide removal
van Dorp, Dennis; Cuypers, Daniel; Arnauts, Sophia; Moussa, Alain; Rodriguez, Leonard; De Gendt, Stefan (2013)