Browsing by author "Bailey, P."
Now showing items 1-10 of 10
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Characterization of low energy (2-5keV) implantation into Si
Collart, E.J.; Kirkwood, D.; Vandenberg, J.A.; Werner, M.; Vandervorst, Wilfried; Brijs, Bert; Bailey, P.; Noakes, T.C.Q. (2002) -
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Werner, M.; van den Berg, J.A.; Armour, D.G.; Vandervorst, Wilfried; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2004) -
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si
van den Berg, J.A.; Armour, D.G.; Werner, M.; Whelan, S.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q. (2002) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M.A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M. A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Fried, M.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
Reading, M. A.; van den Berg, J. A.; Zalm, P. C.; Armour, D. G.; Bailey, P.; Noakes, T. C. Q.; Parisini, A.; Conard, Thierry; De Gendt, Stefan (2010) -
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
Van den berg, J.; Reading, M.A.; Armour, D.G.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
van den Berg, J.A.; Reading, M.A.; Armour, D.G>; Bailey, P.; Noakes, T.C.Q.; Conard, Thierry; De Gendt, Stefan (2009) -
Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si
van den Berg, J.A.; Werner, M.; Armour, D.G.; Vandervorst, Wilfried; Clarysse, Trudo; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C. (2003) -
Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
Popovici, Mihaela Ioana; Redolfi, Augusto; Aoulaiche, Marc; van den Berg, J.A.; Douhard, Bastien; Swerts, Johan; Bailey, P.; Kaczer, Ben; Groven, Benjamin; Meersschaut, Johan; Conard, Thierry; Moussa, Alain; Adelmann, Christoph; Delabie, Annelies; Fazan, Pierre; Van Elshocht, Sven; Jurczak, Gosia (2015)