Browsing by author "Moinpour, Mansour"
Now showing items 1-15 of 15
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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
Abell, Thomas; Iacopi, Francesca; Prokopowicz, Greg; Sun, Brad; Mazurenko, Alex; Travaly, Youssef; Baklanov, Mikhaïl; Jonas, Alain; Sullivan, Chris; Brongersma, Sywert; Liou, Huey-Chiang; Tower, Josua; Gostein, Michael; Gallagher, Mike; Calvert, Jeff; Moinpour, Mansour; Maex, Karen (2005-01) -
Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
Armini, Silvia; De Messemaeker, Joke; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2007) -
Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2007) -
Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study
Armini, Silvia; Whelan, Caroline; Maex, Karen; Hernandez, Jose Luis; Moinpour, Mansour (2007) -
Copper CMP with composite polymer core - silica shell abrasives: A defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2009) -
Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape
Armini, Silvia; Moinpour, Mansour; Whelan, Caroline; Maex, Karen (2007) -
Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM
Armini, Silvia; Burtovyy, Ruslan; Moinpour, Mansour; Luzinov, Igor; De Messemaeker, Joke; Whelan, Caroline; Maex, Karen (2008) -
Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2007) -
Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP
Armini, Silvia; Burtovyy, Ruslan; Luzinov, Igor; Whelan, Caroline; Maex, Karen; Moinpour, Mansour (2008) -
Mixed organic/inorganic abrasive particles during oxide CMP
Armini, Silvia; Whelan, Caroline; Moinpour, Mansour; Maex, Karen (2008) -
Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing
Sun, Yiting; Romo Negreira, Ainhoa; Meersschaut, Johan; Hoflijk, Ilse; Vaesen, Inge; Conard, Thierry; Struyf, Herbert; Tokei, Zsolt; Boemmels, Juergen; Moinpour, Mansour; De Feyter, Steven; Armini, Silvia (2017) -
Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
Armini, Silvia; Moinpour, Mansour; Whelan, Caroline; Maex, Karen; Hernandez, Jose Luis (2007)