Browsing by author "Tillack, Bernd"
Now showing items 1-14 of 14
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Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2017-05) -
Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2017-05) -
Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2018-05) -
Atomically controlled processing for Ge CVD epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2016) -
Atomically controlled processing for in-situ doping in CVD Si and Ge epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2017-07) -
Atomically controlled processing for Si and Ge CVD epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, I.; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2016) -
Atomically controlled processing for Si and Ge CVD epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2016) -
Dopant segregation and diffusion in CVD epitaxial Grown Ge
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Baerwolf, Florian; Tillack, Bernd; Le Thanh, Vinh; Loo, Roger; Douhard, Bastien; Ayyad, Mustafa; Caymax, Matty (2017) -
Dopant segregation and diffusion in CVD epitaxial grown germanium
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Baerwolf, Florian; Tillack, Bernd; Le Thanh, Vinh; Loo, Roger; Douhard, Bastien; Ayyad, Mustafa; Caymax, Matty (2017-11) -
Dopant segregation in Si and Ge CVD epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2016-11) -
Dopant segregation in Si and Ge CVD epitaxial growth
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty (2016) -
EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing
Murota, Junichi; Loo, Roger; Tillack, Bernd; Le Thanh, Vin; Chiussi, Stefano; Hirayama, Makoto; Niwano, Michio (2016) -
EI4GroupIV: Excellence initiative for new group IV semiconductor materials & processing
Murota, Junichi; Loo, Roger; Tillack, Bernd; Le Thanh, Vin; Chiussi, Stefano; Hirayama, Makoto; Niwano, Michio (2016) -
Photoluminescence of phosphorus atomic layer doped Ge grown on Si
Yamamoto, Yuji; Nien, Li-Wei; Capellini, Giovanni; Virgilio, Michele; Costina, Ioan; Schubert, Markus Andreas; Seifert, Wilfried; Srinivasan, Ashwyn; Loo, Roger; Scappucci, Giordano; Sabbagh, Diego; Hesse, Anne; Murota, Junichi; Schroeder, Thomas; Tillack, Bernd (2017)