Browsing by author "Maestre Caro, Arantxa"
Now showing items 1-20 of 20
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Bottom-up engineering of subnanometer copper diffusion barriers using NH2-derived self assembled monolayers
Maestre Caro, Arantxa; Armini, Silvia; Richard, Olivier; Maes, Guido; Borghs, Gustaaf; Whelan, Caroline M.; Travaly, Youssef (2010) -
Electrical properties of amino SAM layers studied with conductive AFM
Chintala, Ravi Chandra; Eyben, Pierre; Armini, Silvia; Maestre Caro, Arantxa; Loyo Prado, Jana; Sun, Yiting; Vandervorst, Wilfried (2013) -
Electroless Cu deposition on self-assembled monolayer alternative barriers
Armini, Silvia; Maestre Caro, Arantxa (2009) -
Electroless deposition on self-assembled monolayers as a method to enable fabrication of advanced interconnects
Maestre Caro, Arantxa; Chebiam, Ramanan V.; Teugels, Lieve; Clendenning, Scott; Clarke, Jim (2013) -
Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules
Maestre Caro, Arantxa; Travaly, Youssef; Maes, Guido; Borghs, Gustaaf; Armini, Silvia (2011) -
Engineering self assembled monolayer as copper diffusion barrier: Cu/NH2-SAM/SiO2 interface characterization
Maestre Caro, Arantxa (2008) -
Evaluation of metallization options for advanced Cu interconnects application
Jourdan, Nicolas; Carbonell, Laure; Heylen, Nancy; Swerts, Johan; Armini, Silvia; Maestre Caro, Arantxa; Demuynck, Steven; Croes, Kristof; Beyer, Gerald; Tokei, Zsolt; Van Elshocht, Sven; Vancoille, Eric (2011) -
Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects
Maestre Caro, Arantxa (2012-06) -
High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
Maestre Caro, Arantxa; Zhao, Larry; Maes, Guido; Borghs, Gustaaf; Beyer, Gerald; Tokei, Zsolt; Armini, Silvia; Travaly, Youssef (2010) -
Materials engineering for future interconnects: catalyst-free electroless Cu deposition on self-assembled monolayer alternative barriers
Armini, Silvia; Maestre Caro, Arantxa (2010) -
Molecular engineering of surfaces for future device architectures using SAMs
Maestre Caro, Arantxa; Whelan, Caroline (2009) -
Nanoscale selective silicon nanowires surface functionalization for sensing applications
Armini, Silvia; Carli, Marta; Snauwaert, Johan; Cherman, Vladimir; De Wolf, Ingrid; Simons, Veerle; Maestre Caro, Arantxa; Moonens, Jos; Neutens, Pieter; Arstila, Kai; Ogi, J.; Oda, S.; Tsuchiya, Yoshi; Mizuta, Hiroshi (2010) -
Nanoscale silicon nanowires surface functionalization and characterization for sensing applications
Armini, Silvia; Carli, Marta; Cherman, Vladimir; Maestre Caro, Arantxa; Moonens, Jos; Neutens, Pieter; Ogi, J.; Oda, S.; Tsuchiya, Y.; Mizuta, H. (2010) -
NH2-terminated self-assembled monolayer as copper diffusion barrier: monolayer characterization
Maestre Caro, Arantxa; Travaly, Youssef; Armini, Silvia (2009) -
Screening self-assembled monolayers as Cu diffusion barriers
Maestre Caro, Arantxa; Maes, Guido; Borghs, Gustaaf; Whelan, Caroline (2008) -
Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene vias
Maestre Caro, Arantxa; Travaly, Youssef; Beyer, Gerald; Tokei, Zsolt; Maes, Guido; Borghs, Gustaaf; Armini, Silvia (2013) -
Self-assembled monolayers as Cu diffusion barriers for advanced interconections: molecular engineering
Maestre Caro, Arantxa; Maes, Guido; Borghs, Gustaaf; Whelan, Caroline (2008) -
Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS
Lenci, Silvia; Pieri, Francesco; Haspeslagh, Luc; De Coster, Jeroen; Decoutere, Stefaan; Maestre Caro, Arantxa; Armini, Silvia; Witvrouw, Ann (2011) -
Temperature insensitive conductance detection with surface-functionalised silicon nanowire sensors
Ghiass, Mohammed Adel; Armini, Silvia; Carli, Marta; Maestre Caro, Arantxa; Cherman, Vladimir; Ogi, Jun; Oda, Shunri; Moktadir, Zakaria; Tsuchiya, Yoshishige; Mizuta, Hiroshi (2011) -
Temperature insensitive conductance detection with surface-functionalized silicon nanowire sensors
Ghiass, Mohammad Adel; Armini, Silvia; Carli, Marta; Maestre Caro, Arantxa; Cherman, Vladimir; Ogi, Jun; Oda, Shunri; Moktadir, Zakaria; Tsuchiya, Joshinage; Mizuta, Hiroshi (2010)