Browsing by author "Ike, Shinichi"
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Epitaxial GeSn: Impact of process conditions on material quality
Loo, Roger; Shimura, Yosuke; Ike, Shinichi; Vohra, Anurag; Stoica, Toma; Stange, Daniela; Buca, Dan; Kohen, David; Margetis, Joe; Tolle, John (2018) -
Epitaxial GeSn: impact of process conditions on material quality
Loo, Roger; Shimura, Yosuke; Ike, Shinichi; Vohra, Anurag; Stoica, Toma; Buca, Dan; Kohen, David; Margetis, Joe; Tolle, John (2018-05) -
Epitaxial GeSn: Impact of process conditions on material quality
Loo, Roger; Shimura, Yosuke; Ike, Shinichi; Vohra, Anurag; Stoica, Toma; Stange, Daniela; Buca, Dan; Kohen, David; Margetis, Joe; Tolle, John (2018) -
Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Loo, Roger; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Ike, Shinichi; Rondas, Dirk; Rosseel, Erik; Shimura, Yosuke; Steenbergen, Johnny; Sun, Jianwu; Wang, Wei; Langer, Robert (2014) -
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki (2015) -
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki (2016) -
Influence of precursor gas source on defect properties in Si1xGex epitaxial thin films
Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki (2015) -
Introduction of Sn into GeSn based group-IV thin films and its impacts
Shimura, Yosuke; Ike, Shinichi; Gencarelli, Federica; Takeuchi, Wakana; Sakashita, Mitsuo; Kurosawa, Masashi; Loo, Roger; Nakatsuka, Osamu; Zaima, Shigeaki (2016-09) -
Structural and electrical properties of low temperature CVD-grown SiGe epitaxial layers
Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki (2016) -
X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers
Loo, Roger; Shimura, Yosuke; Sun, Jianwu; Ike, Shinichi; Inuzuka, Yuuki; Nakatsuka, Osau; Zaima, Shigeaki; Imai, Yasuhiko; Kimura, Shigeru (2015)