Browsing by author "Dutta, Shibesh"
Now showing items 1-20 of 22
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3 omega correction method for eliminating resistance measurement error due to Joule heating
Guralnik, Benny; Hansen, Ole; Henrichsen, Henrik H.; Beltran-Pitarch, Braulio; osterberg, Frederik W.; Shiv, Lior; Marangoni, Thomas A.; Stilling-Andersen, Andreas R.; Cagliani, Alberto; Hansen, Mikkel F.; Nielsen, Peter F.; Oprins, Herman; Vermeersch, Bjorn; Adelmann, Christoph; Dutta, Shibesh; Borup, Kasper A.; Mihiretie, Besira M.; Petersen, Dirch H. (2021) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Dutta, Shibesh; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014-10) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Dutta, Shibesh; Boemmels, Juergen; Tokei, Zsolt (2015) -
Alternative metals: from ab initio screening to calibrated narrow line models
Adelmann, Christoph; Sankaran, Kiroubanand; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Jamieson, Geraldine; Moors, Kristof; Pinna, Nicolo; Ciofi, Ivan; Van Elshocht, Sven; Boemmels, Juergen; Boccardi, Guillaume; Wilson, Chris; Pourtois, Geoffrey; Tokei, Zsolt (2018) -
Atomic layer deposition of ruthenium for advanced interconnect applications
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Wen, Liang Gong; Dutta, Shibesh; Boemmels, Juergen; Tokei, Zsolt; Van Elshocht, Sven (2016) -
Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Popovici, Mihaela Ioana; Groven, Benjamin; Marcoen, Kristof; Phung, Quan; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; Van den Berg, Jaap; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Gosia; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph (2017) -
Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Wen, Liang Gong; Roussel, Philippe; Varela Pedreira, Olalla; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela Ioana; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph (2016-09) -
Characterization of ultra-thin nickel-silicide films synthesized using the solid state reaction of Ni with an underlying Si:P substrate (P: 0.7 to 4.0%)
Peter, Antony; Yu, Hao; Dutta, Shibesh; Rosseel, Erik; Van Elshocht, Sven; Paulussen, Kris; Moussa, Alain; Vaesen, Inge; Schaekers, Marc (2016) -
Direct metal nanowire patterning using ion beam etch
Kundu, Shreya; Dutta, Shibesh; Gupta, Anshul; Jamieson, Geraldine; Piumi, Daniele; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2017) -
Finite size effects in highly scaled ruthenium interconnects
Dutta, Shibesh; Moors, Kristof; Vandemaele, Michiel; Adelmann, Christoph (2018) -
Finite Size Effects in Platinum-group Metal Nanostructures
Dutta, Shibesh (2018-10) -
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Oesterberg, Frederik Westergaard; Witthoeft, Maria-Louise; Dutta, Shibesh; Meersschaut, Johan; Adelmann, Christoph; Nielsen, Peter Former; Hansen, Ole; Petersen, Dirch Hjorth (2018) -
Highly scaled ruthenium interconnects
Dutta, Shibesh; Kundu, Shreya; Gupta, Anshul; Jamieson, Geraldine; Gomez Granados, Juan Fernando; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2017) -
N5 technology node dual-damascene interconnects enabled using multi patterning
Briggs, Basoene; Wilson, Chris; Devriendt, Katia; van der Veen, Marleen; Decoster, Stefan; Paolillo, Sara; Versluijs, Janko; Kesters, Els; Sebaai, Farid; Jourdan, Nicolas; El-Mekki, Zaid; Heylen, Nancy; Verdonck, Patrick; Wan, Danny; Varela Pedreira, Olalla; Croes, Kristof; Dutta, Shibesh; Ryckaert, Julien; Mallik, Arindam; Lariviere, Stephane; Boemmels, Juergen; Tokei, Zsolt (2017) -
Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1-xGex substrate
Peter, Antony; Witters, Thomas; Dutta, Shibesh; Hikavyy, Andriy; Vaesen, Inge; Van Elshocht, Sven; Schaekers, Marc (2016) -
Resistivity scaling model for metals with conduction band anisotropy
De Clercq, Miguel; Moors, Kristof; Sankaran, Kiroubanand; Pourtois, Geoffrey; Dutta, Shibesh; Adelmann, Christoph; Magnus, Wim; Soree, Bart (2018) -
Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
Dutta, Shibesh; Kundu, Shreya; Wen, Lianggong; Jamieson, Geraldine; Croes, Kristof; Gupta, Anshul; Boemmels, Juergen; Wilson, Chris; Adelmann, Christoph; Tokei, Zsolt (2017) -
Ruthenium metallization for advanced interconnects
Wen, Liang Gong; Adelmann, Christoph; Varela Pedreira, Olalla; Dutta, Shibesh; Popovici, Mihaela Ioana; Briggs, Basoene; Heylen, Nancy; Vanstreels, Kris; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Juergen; Tokei, Zsolt (2016) -
Sub-100 nm2 cobalt interconnects
Dutta, Shibesh; Beyne, Sofie; Gupta, Anshul; Kundu, Shreya; Bender, Hugo; Van Elshocht, Sven; Jamieson, Geraldine; Vandervorst, Wilfried; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2018) -
The first observation of p-type electromigration failure in full ruthenium interconnects
Beyne, Sofie; Dutta, Shibesh; Varela Pedreira, Olalla; Bosman, Niels; Adelmann, Christoph; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof (2018)