Browsing by author "Wevers, Martine"
Now showing items 1-11 of 11
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A dedicated loading instrument for characterization and testing of MEMS
Kalicinski, Stanislaw; Sabuncuoglu Tezcan, Deniz; De Moor, Piet; De Vries, Atze-Cees; Van Hoof, Chris; Wevers, Martine; De Wolf, Ingrid (2005-10) -
A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging
Kalicinski, Stanislaw; Tilmans, Harrie; Wevers, Martine; De Wolf, Ingrid (2009) -
A new method to determine the internal pressure and leakage rate of MEMS packages
Wang, Bo; De Coster, Jeroen; Witvrouw, Ann; Severi, Simone; Wevers, Martine; De Wolf, Ingrid (2013) -
A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS
Kalicinski, Stanislaw; Tilmans, Harrie; Wevers, Martine; De Wolf, Ingrid (2007-09) -
A novel method to measure the internal pressure of MEMS thin-film packages
Wang, Bo; De Coster, Jeroen; De Wolf, Ingrid; Wevers, Martine (2013) -
A spectroscopic study of the chromatic properties of GafChromic EBT3 films
Callens, Maarten; Crijns, Wouter; Simons, Veerle; De Wolf, Ingrid; Depuydt, Tom; Maes, Frederik; Haustermans, Karin; D'hooge, Jan; D'Agostino, Emiliano; Wevers, Martine; Pfeiffer, Helge; Van Den Abeele, Koen (2016) -
Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency
Kalicinski, Stanislaw; Wevers, Martine; De Wolf, Ingrid (2008) -
Comparison of three methods to measure the internal pressure of empty MEMS packages
Wang, Bo; Tanaka, Shuji; De Coster, Jeroen; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Gas leak rate study of MEMS thin film package in different environments
Wang, Bo; De Coster, Jeroen; Wevers, Martine; De Wolf, Ingrid (2014) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2011) -
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
Wang, Bo; Tanaka, Shuji; Guo, Bin; Vereecke, Guy; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012)