Browsing by author "Cartier, E."
Now showing items 1-10 of 10
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Atomic layer deposition and remote plasma surface preparation for gate stack applications
Delabie, Annelies; Caymax, Matty; Brijs, Bert; Cartier, E.; Geenen, Luc; Vandervorst, Wilfried; Bajolet, Philippe; Maes, Jan; Tsai, Wilman; De Gendt, Stefan; Heyns, Marc (2003) -
Characterization of the Vt-instability un SiO2 HFO2 gate dielectrics
Kerber, Andreas; Cartier, E.; Pantisano, Luigi; Rosmeulen, Maarten; Degraeve, Robin; Kauerauf, Thomas; Groeseneken, Guido; Maes, Herman; Schwalke, U. (2003) -
Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures
Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, E.; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R. (2003) -
Charge trapping in SiO2/HfO2 dual layer gate stacks
Cartier, E.; Kerber, A.; Pantisano, Luigi (2004) -
Charge trapping in SiO2/HfO2 gate dielctrics: comparison between charge-pumping and pulsed I-D-V-G
Kerber, A.; Cartier, E.; Pantisano, Luigi; Degraeve, Robin; Groeseneken, Guido; Maes, Herman; Schwalke, U. (2004) -
Issues, achievements and challenges towards intergration of high-k dielectrics
Heyns, Marc; Bender, Hugo; Caymax, Matty; Carter, R; Claes, Martine; Conard, Thierry; Boullart, Werner; De Gendt, Stefan; Degraeve, Robin; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Kubicek, Stefan; Lujan, Guilherme; Nohira, H.; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Vandervorst, Wilfried; Van Elshocht, Sven; Xu, Zhen; Zhao, Chao; Cartier, E.; Chen, J.; Cosnier, V.; Green, M.; Jang, S.E.; Kaushik, Vidya; Kerber, A.; Kluth, J.; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002) -
Mobility in high-k dielectric based field effect transistors
Ragnarsson, Lars-Ake; Tsai, Wilman; Kerber, Andreas; Chen, P.J.; Cartier, E.; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc (2003) -
Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
Tsai, Wilman; Ragnarsson, Lars-Ake; Pantisano, Luigi; Chen, P.; Onsia, Bart; Schram, Tom; Cartier, E.; Kerber, Andreas; Young, Edward; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2003-12) -
Stress induced charge trapping effects in SiO2/Al2O3 gate stacks with TiN electrodes
Kerber, Andreas; Cartier, E.; Groeseneken, Guido; Maes, Herman; Schwalke, U. (2003) -
Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks
Degraeve, Robin; Kauerauf, Thomas; Kerber, Andreas; Cartier, E.; Govoreanu, Bogdan; Roussel, Philippe; Pantisano, Luigi; Blomme, Pieter; Kaczer, Ben; Groeseneken, Guido (2003)