Browsing by author "Cho, Hag-Ju"
Now showing items 1-15 of 15
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A 50nm high-k poly silicon gate stack with a buried SiGe channel
Jakschik, S.; Hoffmann, Thomas Y.; Cho, Hag-Ju; Veloso, Anabela; Loo, Roger; Hyun, S.; Sorada, H.; Inoue, A.; de Potter de ten Broeck, Muriel; Eneman, Geert; Severi, Simone; Absil, Philippe; Biesemans, Serge (2007) -
A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
Chang, Vincent; Ragnarsson, Lars-Ake; Pourtois, Geoffrey; O'Connor, Robert; Adelmann, Christoph; Van Elshocht, Sven; Delabie, Annelies; Swerts, Johan; Van der Heyden, Nikolaas; Conard, Thierry; Cho, Hag-Ju; Akheyar, Amal; Mitsuhashi, Riichirou; Witters, Thomas; O'Sullivan, Barry; Pantisano, Luigi; Rohr, Erika; Lehnen, Peer; Kubicek, Stefan; Schram, Tom; De Gendt, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates
Ragnarsson, Lars-Ake; Chang, Vincent; Yu, HongYu; Cho, Hag-Ju; Conard, Thierry; Yin, KaiMin; Delabie, Annelies; Swerts, Johan; Schram, Tom; De Gendt, Stefan; Biesemans, Serge (2007-06) -
Demonstration of metal-gated low Vt n-MOSFETs using a Poly-Si/TaN/Dy2O3/SiON gate stack with a scaled EOT value
Yu, HongYu; Singanamalla, Raghunath; Ragnarsson, Lars-Ake; Chang, Vincent; Cho, Hag-Ju; Mitsuhashi, Riichirou; Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Chang, Shou-Zen; Yin, K.M.; Schram, Tom; Kubicek, Stefan; De Gendt, Stefan; Absil, Philippe; De Meyer, Kristin; Biesemans, Serge (2007) -
DyScHfO as high-k gate dielectric: structural and electrical properties
Adelmann, Christoph; Van Elshocht, Sven; Lehnen, Peer; Conard, Thierry; Franquet, Alexis; Zhao, Chao; Ragnarsson, Lars-Ake; Chang, Vincent S.; Cho, Hag-Ju; Yu, HongYu; De Gendt, Stefan (2007) -
Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Li, Zilan; Schram, Tom; Witters, Thomas; Cho, Hag-Ju; O'Sullivan, Barry; Hooker, Jacob; De Gendt, Stefan; De Meyer, Kristin (2007) -
Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Li, Zilan; Schram, Tom; Witters, Thomas; Cho, Hag-Ju; O'Sullivan, Barry; Yamada, Naoki; Tsunoda, Takaaki; Hooker, Jacob; De Gendt, Stefan; De Meyer, Kristin (2008) -
Low VT CMOS using doped Hf-based oxides, TaC-based metals and laser-only anneal
Kubicek, Stefan; Schram, Tom; Paraschiv, Vasile; Vos, Rita; Demand, Marc; Adelmann, Christoph; Witters, Thomas; Nyns, Laura; Ragnarsson, Lars-Ake; Yu, HongYu; Veloso, Anabela; Singanamalla, Raghunath; Kauerauf, Thomas; Rohr, Erika; Brus, Stephan; Vrancken, Christa; Chang, Vincent; Mitsuhashi, Riichirou; Akheyar, Amal; Cho, Hag-Ju; Hooker, Jacob; O'Sullivan, Barry; Chiarella, Thomas; Kerner, Christoph; Delabie, Annelies; Van Elshocht, Sven; De Meyer, Kristin; De Gendt, Stefan; Absil, Philippe; Hoffmann, Thomas Y.; Biesemans, Serge (2007) -
Low VT metal-gate/high-k nMOSFETs - PBTI dependence and VT tune-ability on La/Dy-capping layer locations and laser annealing conditions
Chang, Shou-Zen; Hoffmann, Thomas Y.; Yu, HongYu; Aoulaiche, Marc; Rohr, Erika; Adelmann, Christoph; Kaczer, Ben; Delabie, Annelies; Favia, Paola; Van Elshocht, Sven; Kubicek, Stefan; Schram, Tom; Witters, Thomas; Ragnarsson, Lars-Ake; Wang, Xin Peng; Cho, Hag-Ju; Mueller, Markus; Chiarella, Thomas; Absil, Philippe; Biesemans, Serge (2008) -
Nitrogen profile and dielectric cap layer (Al2O3, Dy2O3, La2O3) engineering on Hf-silicate
Cho, Hag-Ju; Yu, HongYu; Ragnarsson, Lars-Ake; Chang, Vincent; Schram, Tom; O'Sullivan, Barry; Kubicek, Stefan; Mitsuhashi, Riichirou; Akheyar, Amal; Van Elshocht, Sven; Witters, Thomas; Delabie, Annelies; Adelmann, Christoph; Rohr, Erika; Singanamalla, Raghunath; Chang, Shou-Zen; Swerts, Johan; Lehnen, Peer; De Gendt, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
Novel process to pattern selectively dual dielectric capping layers using soft-mask only
Schram, Tom; Kubicek, Stefan; Rohr, Erika; Brus, Stephan; Vrancken, Christa; Chang, Shou-Zen; Chang, V.S.; Mitsuhashi, Riichiru; Okuno, Yasutoshi; Akheyar, Amal; Cho, Hag-Ju; Hooker, J.C.; Paraschiv, Vasile; Vos, Rita; Sebaai, Farid; Ercken, Monique; Kelkar, Prasad; Delabie, Annelies; Adelmann, Christoph; Witters, Thomas; Ragnarsson, Lars-Ake; Kerner, Christoph; Chiarella, Thomas; Aoulaiche, Marc; Cho, Moon Ju; Kauerauf, Thomas; De Meyer, Kristin; Lauwers, Anne; Hoffmann, Thomas Y.; Absil, Philippe; Biesemans, Serge (2008) -
Oxygen-vacancy-induced Vt shift in La-containing devices
O'Sullivan, Barry; Mitsuhashi, Riichirou; Pourtois, Geoffrey; Chang, Vincent; Adelmann, Christoph; Schram, Tom; Ragnarsson, Lars-Ake; Van der Heyden, Nikolaas; Cho, Hag-Ju; Harada, Y.; Veloso, Anabela; O'Connor, Robert; Pantisano, Luigi; Yu, HongYu; Groeseneken, Guido; Absil, Philippe; Biesemans, Serge; Ikeda, Atsushi; Niwa, Masaaki (2007) -
Strain enhanced Low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay
Kubicek, Stefan; Schram, Tom; Rohr, Erika; Paraschiv, Vasile; Vos, Rita; Demand, Marc; Adelmann, Christoph; Witters, Thomas; Nyns, Laura; Delabie, Annelies; Ragnarsson, Lars-Ake; Chiarella, Thomas; Kerner, Christoph; Mercha, Abdelkarim; Parvais, Bertrand; Aoulaiche, Marc; Ortolland, Claude; Yu, HongYu; Veloso, Anabela; Witters, Liesbeth; Singanamalla, Raghunath; Kauerauf, Thomas; Brus, Stephan; Vrancken, Christa; Chang, V.S.; Chang, Shou-Zen; Mitsuhashi, Riichirou; Okuno, Yasutoshi; Akheyar, Amal; Cho, Hag-Ju; Hooker, J.; O'Sullivan, Barry; Van Elshocht, Sven; De Meyer, Kristin; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2008) -
The impact of stacked cap layers on effective work function with HfSiON and SiON gate dielectrics
Cho, Hag-Ju; Yu, Hong Yu; Chang, Vincent S.; Akheyar, Amal; Jakschik, Stefan; Conard, Thierry; Hantschel, Thomas; Delabie, Annelies; Adelmann, Christoph; Van Elshocht, Sven; Ragnarsson, Lars-Ake; Schram, Tom; Absil, Philippe; Biesemans, Serge (2008-07) -
Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme
Wang, Xin Peng; Yu, HongYu; Yeo, Y.-C.; Li, M.-F.; Chang, Shou-Zen; Cho, Hag-Ju; Kubicek, Stefan; Wouters, Dirk; Groeseneken, Guido; Biesemans, Serge (2008)