Browsing by author "Fliervoet, Timon"
Now showing items 1-14 of 14
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Actinic characterization and modeling of the EUV mask stack
Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Davydova, Natalia; Fliervoet, Timon; Neumann, Jens Timo (2013) -
Alternative EUV mask technology for mask 3D effect compensation
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Knops, Roel; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2014) -
Alternative EUV mask technology to compensate for mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Vandenberghe, Geert; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Assist features: placement, impact and relevance
Mochi, Iacopo; Philipsen, Vicky; Gallagher, Emily; Hendrickx, Eric; Lyakhova, Kateryna; Wittebrood, Friso; Schiffelers, Guido; Fliervoet, Timon; Wang, Shibing; Hsu, Stephen; Plachecki, Vince; Baron, Stan; Laenens, Bart (2016) -
Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control
Finders, Jo; Dusa, Mircea; Vleeming, Bert; Fliervoet, Timon; Hepp, Birgitt; Megens, henry; Groenendijk, Remco; Quaedackers, John; Mos, Evert; Leewis, Christian; Bornebroek, Frank; Maenhoudt, Mireille; Leblans, Marc; Vandeweyer, Tom; Murdoch, Gayle; Altamirano Sanchez, Efrain (2009) -
Experimental validation of novel EUV mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Experimental validation of novel mask technology to reduce mask 3D effects
Van Look, Lieve; Philipsen, Vicky; Hendrickx, Eric; Davydova, Natalia; Wittebrood, Friso; De Kruif, Robert; Van Oosten, Anton; Miyazaki, Junji; Fliervoet, Timon; Van Schoot, Jan; Neumann, Jens Timo (2015) -
Fundamental understanding and experimental verification of bright versus dark field imaging
Davydova, Natalia; Finders, Jo; van Lare, Claire; McNamara, John; Van Setten, Eelco; Zekry, Joseph; Fliervoet, Timon; Carpaij, Rene; Franke, Joern-Holger; Frommhold, Andreas; Verch, Andreas; Kersteen, Grizelda; Capelli, Renzo (2020) -
Impact of mask stack on high NA EUV imaging
Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Vandenberghe, Geert; Davydova, Natalia; Fliervoet, Timon; Neumann, Jens Timo (2012) -
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
Lorusso, Gian; Mao, Ming; Reijnen, Liesbeth; Viatkina, Katja; Knops, Roel; Fliervoet, Timon (2015) -
LENS - Lithography enhancement towards nano scale
Cantu, Pietro; Baldi, Livio; De Simone, Danilo; Piacentini, Paolo; Fliervoet, Timon; Alberga, Gerold; Le Gratiet, Bertrand; Gaugiran, Stephanie; Wong, Patrick; Miyashita, Hiroyuki; Atzei, Luisa Rita; Buch, Xavier; Verkleiji, Dick; Toublan, Olivier; Perez Murano, Francesc; Mecerreyes, David (2010) -
Mask 3D effect mitigation by source optimization and assist feature placement
Van Look, Lieve; Mochi, Iacopo; Philipsen, Vicky; Gallagher, Emily; Hendrickx, Eric; McIntyre, Greg; Wittebrood, Friso; Lyakhova, Kateryna; de Winter, Laurens; Last, Thorsten; Fliervoet, Timon; Schiffelers, Guido; Finders, Jo; Van Adrichem, Paul; Lyons, Adam; Laenens, Bart; Liddle, Jack; Neumann, Jens Timo (2016) -
NXE:3300 insertion for N7 : status and challenges
Philipsen, Vicky; Mochi, Iacopo; Van Look, Lieve; Lorusso, Gian; Luong, Vu; Hendrickx, Eric; Wittebrood, Friso; Schiffelers, Guido; van Setten, Eelco; Fliervoet, Timon; Dusa, Mircea (2015) -
Single exposure EUV patterning for BEOL metal layers on the imec iN7 platform
Blanco, Victor; Bekaert, Joost; Mao, Ming; Kutrzeba Kotowska, Bogumila; Lariviere, Stephane; Ciofi, Ivan; Baert, Rogier; Kim, Ryan Ryoung han; Gallagher, Emily; Hendrickx, Eric; Tan, Ling Ee; Gillijns, Werner; Trivkovic, Darko; Leray, Philippe; Halder, Sandip; Gallagher, Matt; Lazzarino, Frederic; Paolillo, Sara; Wan, Danny; Mallik, Arindam; Sherazi, Yasser; McIntyre, Greg; Dusa, Mircea; Rusu, Paul; Hollink, Thijs; Fliervoet, Timon; Wittebrood, Friso (2017)