Browsing by author "Kenens, Conny"

A controlled deposition of organic contamination and the removal with ozone based cleaning

Claes, Martine; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Lagrange, Sébastien; Mertens, Paul; Heyns, Marc (2001)

Combining TOF-SIMS with XPS to quantify organic surface coverages

Kenens, Conny; Conard, Thierry; Hellemans, L.; Bertrand, P.; Vandervorst, Wilfried (2000)

Combining TOFSIMS with XPS and AFM to quantify organic surface coverages

Kenens, Conny; Conard, Thierry; Vandervorst, Wilfried (2000)

Controlled deposition of organic contamination and removal with ozone-based cleaning

Claes, M.; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc (2001)

Cost-effective cleaning and high-quality thin gate oxides

Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Groeseneken, Guido; Kenens, Conny; Knotter, D. M.; Loewenstein, Lee; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Schaekers, Marc; Teerlinck, Ivo; Vandervorst, Wilfried; Vos, Rita; Wolke, K. (1999)

Efficiency of ozonated DI water in removing organic contamination

Kenens, Conny; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc (1998)

Organic contamination in the integrated circuit processing: controlled by and for time-of-flight secondary ion mass spectrocopy.

Kenens, Conny (2000)