Browsing by author "Delande, Tinne"
Now showing items 1-20 of 32
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An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Usman Ibrahim, Ansar; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Ansar, Sheik; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering
Armini, Silvia; Herregods, Sebastiaan; Lecordier, Laurent; Verheyen, Claudia; Delande, Tinne; Demeurisse, Caroline; Spampinato, Valentina; Tokei, Zsolt; Struyf, Herbert (2017) -
Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques
Redolfi, Augusto; Kubicek, Stefan; Rooyackers, Rita; Kim, Min-Soo; Sleeckx, Erik; Devriendt, Katia; Shamiryan, Denis; Vandeweyer, Tom; Delande, Tinne; Horiguchi, Naoto; Togo, Mitsuhiro; Wouters, Johan M. D.; Jurczak, Gosia; Hoffmann, Thomas Y.; Cockburn, Andrew; Gravey, Virginie; Diehl, D.L. (2012) -
Chemical mechanical polishing of nickel for damascene applications
Teugels, Lieve; Van den Eynde, Matthias; Delande, Tinne; Leunissen, Peter (2012) -
Cu/Low-k thickness measurement for advanced Cu CMP process development and control
Li, Yunlong; Heylen, Nancy; Delande, Tinne; Kellens, Kristof; Ong, Patrick; Leunissen, Peter; Tarnowka, Alexandre; Eliyahu, Aviv (2009-03) -
Dummy design characterization for STI CMP with fixed abrasive
Tsvetanova, Diana; Devriendt, Katia; Ong, Patrick; Vandeweyer, Tom; Delande, Tinne; Chew, Soon Aik; Horiguchi, Naoto; Struyf, Herbert (2014-11) -
Enabling porous low-k dielectric sealing against CVD Mn indiffusion in 22nm half-pitch (dual) damascene interconnects by deposition of sub-1nm thin organic films: from fundamentals to reliability
Armini, Silvia; Lesniewska, Alicja; Jourdan, Nicolas; Delande, Tinne; Vega Gonzalez, Victor; Wilson, Chris; Struyf, Herbert; Tokei, Zsolt (2017) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, S; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, Sitaraman; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Integration of capillary self-alignment for Face to Face micro bump bonding
Pham, Nga; Daily, Robert; Armini, Silvia; Delande, Tinne; Pantouvaki, Marianna; Soussan, Philippe (2013-09) -
Linearity of TXRF: droplet residues versus spin-coated wafers
Hellin, David; Fyen, Wim; Rip, Jens; Delande, Tinne; De Gendt, Stefan; Vinckier, Chris (2005) -
Optical metrology based post Cu CMP metal residue detection and characterization
Li, Yunlong; Tarnowka, Alexandre; Eliyahu, Aviv; Heylen, Nancy; Delande, Tinne; Favia, Paola; Bender, Hugo; Kellens, Kristof; Leunissen, Peter (2009) -
Partial wetting of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish
Vereecke, Guy; Xu, XiuMei; Tsai, W.K.; Yang, Hui; Armini, Silvia; Delande, Tinne; Doumen, Geert; Kentie, F.; Shi, Xiaoping; Simms, Ihsan; Nafus, Kathleen; Holsteyns, Frank; Struyf, Herbert; De Gendt, Stefan (2014) -
Post ion-implant photoresist removal via wet chemical cleans combined with physical force pretreatments
Totir, George; Frank, Martin M.; Vos, Rita; Arnauts, Sophia; Bearda, Twan; Kenis, Karine; Delande, Tinne; Le, Quoc Toan; Kesters, Els; Vereecke, Guy; Mannaert, Geert; Lux, Marcel; Hoflijk, Ilse; Conard, Thierry; Banerjee,; Malhouitre, Stephane; Leunissen, Peter; Mertens, Paul (2007) -
Remediation for TXRF saturation effects on micro-droplet residues from preconcentration methods on semiconductor wafers
Hellin, David; Rip, Jens; Geens, Veerle; Delande, Tinne; Conard, Thierry; De Gendt, Stefan; Vinckier, Chris (2005) -
Saturation effects in TXRF on micro-droplet residue samples
Hellin, David; Fyen, Wim; Rip, Jens; Delande, Tinne; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004) -
Self-organized organic/inorganic films functional to next generation metallization schemes
Armini, Silvia; Carnevali, Guido; Sun, Yiting; Zhang, Liping; de Marneffe, Jean-Francois; Zhang, Yu; Baklanov, Mikhaïl; Jourdan, Nicolas; Verdonck, Patrick; Teugels, Lieve; Delande, Tinne; Wen, Liang Gong; Struyf, Herbert; Boemmels, Juergen; Tokei, Zsolt (2014) -
Silicon nanowires for advanced sensing: Electrical and electromechanical characteristics and functionalisation technology
Mizuta, Hiroshi; Hassani, Fadeh; Tsuchiya, Yoshi; Ghiass, M. Adel; Armini, Silvia; Delande, Tinne; Loyo Prado, Jana; Cherman, Vladimir; Dupre, Cecilia; Ollier, Eric (2011) -
The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Travaly, Youssef; Sinapi, Fabrice; Heylen, Nancy; Humbert, Aurelie; Delande, Tinne; Caluwaerts, Rudy; Gueneau de Mussy, Jean Paul; Vereecke, Guy; Baklanov, Mikhaïl; Iacopi, Francesca; Hernandez, Jose Luis; Beyer, Gerald; Fischer, Pamela (2007)