Browsing by author "Deweerdt, Bruno"
Now showing items 1-12 of 12
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A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate
Wang, Qingfeng; Lauwers, A.; Deweerdt, Bruno; Verbeeck, Rita; Loosen, Fred; Maex, Karen (1995) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Stucchi, Michele; Vrancken, Christa; Deweerdt, Bruno; Maex, Karen (1999) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Jin, S.; Bender, Hugo; Stucchi, Michele; Vrancken, Evi; Deweerdt, Bruno; Maex, Karen (2000) -
Direct SiGe BFFT patterning by dry plasma etching
Milenin, Alexey; Witters, Liesbeth; Deweerdt, Bruno; Vrancken, Christa; Demand, Marc (2012) -
Effect of silicidation schemes on interface contact resistance
Wang, Qingfeng; Lauwers, Anne; Deweerdt, Bruno; Maex, Karen (1994) -
Formation of deep submicrometer cobalt silicated poly gate using bilayer processes
Wang, Qingfeng; Lauwers, Anne; Deweerdt, Bruno; Verbeeck, Rita; Maex, Karen (1995) -
Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
Carbonell, Laure; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Tokei, Zsolt; Hendrickx, Dirk; Struyf, Herbert; Vandervorst, Alain; Claes, Martine; Lux, Marcel; Versluijs, Janko; Alaerts, Wilfried; Van Besien, Els; Deweerdt, Bruno; Vaes, Jan; Caluwaerts, Rudy; Cockburn, Andrew; Gravey, Virginie; Shah, Kavita; Al-Bayati, A.; Fu, X.; Lubben, D.; Sundarrajan, A.; Beyer, Gerald (2008) -
On the formation of silicides on polyrunners with topography by a two-step silicidation process
Jonckx, Franky; Verbeeck, Rita; Deweerdt, Bruno; Maex, Karen (1995) -
Stress Relaxation in Al-Si-Cu Thin Films and Lines
Witvrouw, Ann; Proost, Joris; Deweerdt, Bruno; Roussel, Philippe; Maex, Karen (1994) -
Stress relaxation in Al-Si-Cu thin films and lines
Witvrouw, Ann; Proost, Joris; Deweerdt, Bruno; Roussel, Philippe; Maex, Karen (1995) -
The detrimental effect of a passivation on the electromigration lifetime of narrow Al-Si-Cu lines
Witvrouw, Ann; Roussel, Philippe; Deweerdt, Bruno; Maex, Karen (1995) -
Ti/Co bilayers in salicide technology: electrical evaluation
Lauwers, Anne; Wang, Qingfeng; Deweerdt, Bruno; Maex, Karen (1995)