Browsing by author "Leunissen, Peter"
Now showing items 21-40 of 112
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Damage review on gate stack test structures after high-velocity aerosol cleaning
Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro (2007) -
Demonstration of integrating post-thinning clean and TSV exposure recess etch into a wafer backside thinning process
Zhao, Ming; Hayakawa, Susumu; Nishida, Yoshiteru; Jourdain, Anne; Tabuchi, Tomotaka; Leunissen, Peter (2012) -
Demonstration of ultra-thin Si grinding process controlled by in-situ non-contact gauge for 3D stacked IC (3D-SIC)
Zhao, Ming; Verbinnen, Greet; Yoshida, Shinji; Hayakawa, Susumu; Tabuchi, Tomotaka; Jourdain, Anne; Beyne, Eric; Swinnen, Bart; Leunissen, Peter (2010) -
Determining the impact of statistical fluctuations on resist edge roughness
Leunissen, Peter; Ercken, Monique; Patsis, G.P. (2005) -
Determining the impact of statistical fluctuations on resist line edge roughness
Leunissen, Peter; Ercken, Monique; Patsis, George P. (2004) -
Determining the transfer function of a mask fabrication process
Leunissen, Peter; Philipsen, Vicky; Jonckheere, Rik (2004) -
Determining the transfer function of a mask fabrication process
Leunissen, Peter; Philipsen, Vicky; Jonckheere, Rik (2004-01) -
Development of a dielectric CMP process for replacement gate applications
Devriendt, Katia; Ong, Patrick; Kellens, Kristof; Veloso, Anabela; Crabbe, Yvo; Brus, Stephan; Claes, Martine; Leunissen, Peter (2010) -
Direct copper electrochemical deposition on Ru-based substrates for advanced interconnects target 30 nm and ½ pitch lines: from coupon to full-wafer experiments
Armini, Silvia; Demuynck, Steven; El-Mekki, Zaid; Swerts, Johan; Nagar, Magi; Radisic, Alex; Heylen, Nancy; Beyer, Gerald; Leunissen, Peter; Vereecken, Philippe (2011-05) -
Effect of plasma treatments on the compatibility of ULK to wet cleaning
Xu, Kaidong; Kesters, Els; Vereecke, Guy; Lux, Marcel; Kraus, H; Henry, S.A.; Archer, L; Gaulhofer, E.; Kovacs, F.; Dalmer, M; Schmidt, T; Leunissen, Peter; Mertens, Paul; Luo, S.J.; Han, Q. Y. (2007) -
Effects of different processing conditions on line edge roughness for 193-nm and 157-nm resists
Ercken, Monique; Leunissen, Peter; Pollentier, Ivan; Patsis, G.; Constantoudis, V.; Gogolides, Evangelos (2004) -
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Li, Yunlong; Heylen, Nancy; Daviot, Jerome; Reid, Chris; Leunissen, Peter (2010) -
Electrochemical, physical, and electrical characterization of two clean solutions for Cu PCMP clean
Li, Yunlong; Heylen, Nancy; Daviot, Jerome; Reid, Chris; Leunissen, Peter (2012-04) -
Electrodeposition for 3D integration
Philipsen, Harold; Radisic, Alex; Luhn, Ole; Civale, Yann; Vandersmissen, Kevin; Rodet, Simon; Honore, Mia; Leunissen, Peter (2010) -
Electrodeposition of platinum thin films for flexible interconnects in implantable medical devices
Morcos, Bishoy; Radisic, Alex; O'Callaghan, John; Qian, Karen; Amira, Mohammed; Leunissen, Peter; Van Hoof, Chris; Op de Beeck, Maaike (2012-08) -
Electroless copper bath stability monitoring with UV-VIS spectroscopy, pH, and mixed potential measurements
Inoue, Fumihiro; Philipsen, Harold; Radisic, Alex; Armini, Silvia; Civale, Yann; Shingubara, Shoso; Leunissen, Peter (2012) -
Electroless Cu deposition on atomic layer deposited Ru as novel seed formation process in through-Si vias
Inoue, Fumihiro; Philipsen, Harold; Radisic, Alex; Armini, Silvia; Civale, Yann; Leunissen, Peter; Kondo, Muneharu; Webb, Eric; Shingubara, Shoso (2013) -
Enhanced asymmetric magnetization reversal in nanoscale Co/CoO arrays : competition between exchange bias and magnetostatic coupling
Girgis, E.; Portugal, R.D.; Loosvelt, H.; Van Bael, M.J.; Gordon, I.; Malfait, M.; Temst, K.; Van Haesendonck, C.; Leunissen, Peter; Jonckheere, Rik (2003-11) -
Enhanced asymmetric magnetization reversal in nanoscale Co/CoO arrays : competition between exchange bias and magnetostatic coupling
Girgis, E.; Portugal, R.D.; Loosvelt, H.; Van Bael, M.J.; Gordon, Ivan; Malfait, Mathieu; Temst, K.; Van Haesendonck, C.; Leunissen, Peter; Jonckheere, Rik (2003-10) -
EUV resist screening: current performance and issues
Goethals, Mieke; Gronheid, Roel; Leunissen, Peter; Van Roey, Frieda; Solak, Harun (2005-06)