Browsing by author "Tokei, Zsolt"
Now showing items 21-40 of 498
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A novel test structure to study intrinsic reliability of barrier/low-k
Zhao, Larry; Tokei, Zsolt; Gianni, Giai Gischia; Pantouvaki, Marianna; Croes, Kristof; Beyer, Gerald (2009) -
A tool flow for predicting system level timing failures due to interconnect reliability degradation
Guo, Jin; Papanikolaou, Antonis; Stucchi, Michele; Croes, Kristof; Tokei, Zsolt; Catthoor, Francky (2008) -
Ab initio screening of metallic MAX ceramics for advanced interconnect applications
Sankaran, Kiroubanand; Moors, Kristof; Tokei, Zsolt; Adelmann, Christoph; Pourtois, Geoffrey (2021) -
Accurate determination of interlayer resistivity of 2-D layered systems: graphene case study
Nashed, Ramy; Pan, Chenyun; Wu, Xiangyu; Asselberghs, Inge; Tokei, Zsolt; Catthoor, Francky; Naeemi, Azad (2020) -
Advanced experimental Back-End-Of-Line (BEOL) stability test: measurements and simulations
Vanstreels, Kris; Cherman, Vladimir; Gonzalez, Mario; De Wolf, Ingrid; Van der Plas, Geert; De Vos, Joeri; Boemmels, Juergen; Tokei, Zsolt (2015) -
Advanced experimental BEOL stability test: measurements and simulations
Vanstreels, Kris; Cherman, Vladimir; Gonzalez, Mario; De Wolf, Ingrid; Van der Plas, Geert; De Vos, Joeri; Boemmels, Juergen; Tokei, Zsolt (2014) -
Advanced solutions for copper and low k technology
Beyer, Gerald; Baklanov, Mikhaïl; Brongersma, Sywert; De Roest, David; Donaton, R.; Grillaert, Joost; Lanckmans, Filip; Maenhoudt, Mireille; Maex, Karen; Richard, Emmanuel; Struyf, Herbert; Stucchi, Michele; Tokei, Zsolt; Van Hove, Marleen; Vervoort, Iwan (2000) -
Airgaps for interconnects: Ready to go?
Beyer, Gerald; Pantouvaki, Marianna; Tokei, Zsolt (2010) -
Al3Sc thin films as alternative interconnect metallization
Soulie, Jean-Philippe; Adelmann, Christoph; Swerts, Johan; Tokei, Zsolt (2022-03-28) -
ALD Ru and its applications in DRAM MIM-capacitors and interconnect
Schaekers, Marc; Swerts, Johan; Altimime, Laith; Tokei, Zsolt (2011) -
Alpha-Ta formation and its impact on electromigration
Demuynck, Steven; Tokei, Zsolt; Bruynseraede, Christophe; Michelon, Julien; Maex, Karen (2003) -
Alpha-Ta formation and its impact on electromigration
Demuynck, Steven; Tokei, Zsolt; Bruynseraede, Christophe; Michelon, Julien; Maex, Karen (2004) -
Alternative integration of ultra low-k dielectrics by template replacement approach
Zhang, Liping; de Marneffe, Jean-Francois; Heylen, Nancy; Murdoch, Gayle; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhaïl (2015) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Dutta, Shibesh; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014-10) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Dutta, Shibesh; Boemmels, Juergen; Tokei, Zsolt (2015) -
Alternative metals: from ab initio screening to calibrated narrow line models
Adelmann, Christoph; Sankaran, Kiroubanand; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Jamieson, Geraldine; Moors, Kristof; Pinna, Nicolo; Ciofi, Ivan; Van Elshocht, Sven; Boemmels, Juergen; Boccardi, Guillaume; Wilson, Chris; Pourtois, Geoffrey; Tokei, Zsolt (2018) -
Aluminide intermetallics for advanced interconnect metallization: thin film studies
Soulie, Jean-Philippe; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph (2021) -
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Beyer, Gerald; Gallacher, Barry; Bull, Steve; Horsfall, Alton; O'Neill, Anthony (2010)