Browsing by author "Vervoort, Iwan"
Now showing items 21-38 of 38
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Integration of single damascene 85/85nm/L/S copper trenches in black diamond using 193nm optical lithography with dipole illumination
Van Olmen, Jan; Wu, Wen; Van Hove, Marleen; Travaly, Youssef; Brongersma, Sywert; Eyckens, Brenda; Maenhoudt, Mireille; Van Aelst, Joke; Struyf, Herbert; Demuynck, Steven; Tokei, Zsolt; Vervoort, Iwan; Sijmus, Bram; Vos, Ingrid; Ciofi, Ivan; Stucchi, Michele; Maex, Karen; Iacopi, Francesca (2003) -
Integrations of Cu and low-k dielectrics: effect of hard mask dry etch and post-CMP clean on electrical performance of damascene structures
Donaton, R. A.; Coenegrachts, Bart; Maenhoudt, Mireille; Pollentier, Ivan; Struyf, Herbert; Vanhaelemeersch, Serge; Grillaert, Joost; Fyen, Wim; Beyer, Gerald; Stucchi, Michele; Richard, Emmanuel; Vervoort, Iwan; De Roest, David; Maex, Karen (2000) -
Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background
Bender, Hugo; Jin, S.; Vervoort, Iwan; Lantasov, Yuri (1999) -
Limitations to copper grain growth in narrow trenches
Brongersma, Sywert; Kerr, Emma; Vervoort, Iwan; Maex, Karen (2001) -
Nanoindentation on low-k dielectrics
Brongersma, Sywert; Nolan, M.; Vervoort, Iwan; Maex, Karen (2002) -
Non-correlated behavior of sheet resistance and stress during self-annealing of electroplated copper
Brongersma, Sywert; Vervoort, Iwan; Judelewicz, Moshe; Bender, Hugo; Conard, Thierry; Vandervorst, Wilfried; Beyer, Gerald; Richard, Emmanuel; Palmans, Roger; Lagrange, Sébastien; Maex, Karen (1999) -
Preparation and characterization of electrochemically deposited copper alloys
Le, Quoc Toan; Vervoort, Iwan; Caluwaerts, Rudy; Conard, Thierry; Vanhaeren, Danielle; Maex, Karen (2002) -
Rapid thermal anealing of electro chemically plated Cu films
Beyer, Gerald; Kitabijan, P.; Brongersma, Sywert; Proost, Joris; Bender, Hugo; Richard, Emmanuel; Vervoort, Iwan; Hey, P.; Zhang, P.; Maex, Karen (2000) -
Rapid thermal annealing of electro chemically plated Cu films
Beyer, Gerald; Kitabijan, P.; Brongersma, Sywert; Bender, Hugo; Richard, Emmanuel; Vervoort, Iwan; Hey, P.; Zhang, P.; Maex, Karen (1999) -
Roles of additive during filling process of damascene structures with electrochemical deposited copper
Richard, Emmanuel; Vervoort, Iwan; Brongersma, Sywert; Beyer, Gerald; Bender, Hugo; Palmans, Roger; Lagrange, Sébastien; Maex, Karen (1999) -
Roles of additives during filling process of damascene structures with electrochemical deposited copper
Richard, Emmanuel; Vervoort, Iwan; Brongersma, Sywert; Bender, Hugo; Beyer, Gerald; Palmans, Roger; Lagrange, Sébastien; Maex, Karen (2000) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (2000) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (1999) -
Stress and impurities in electroplated copper
Brongersma, Sywert; Kerr, Emma; Vervoort, Iwan; Richard, Emmanuel; Maex, Karen (2001) -
Stress in electrochemically deposited copper
Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan; Maex, Karen (1999) -
The thickness and temperature dependent resistivity of thin copper films
Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Wu, Wen; Vervoort, Iwan; Palmans, Roger; Hoflijk, Ilse; Bender, Hugo; Hui, W.; Carbonell, Laure; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen (2003) -
Thickness and temperature dependent resistivity of thin copper films
Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Wu, Wen; Vervoort, Iwan; Palmans, Roger; Hoflijk, Ilse; Bender, Hugo; Hui, W.; Carbonell, Laure; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen (2004) -
Two-step room temperature grain growth in electroplated copper
Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan; Bender, Hugo; Vandervorst, Wilfried; Lagrange, Sébastien; Beyer, Gerald; Maex, Karen (1999)