Browsing by author "Rincon Delgadillo, Paulina"
Now showing items 21-40 of 72
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Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
Wan, Ling-Shu; Rincon Delgadillo, Paulina; Gronheid, Roel; Nealey, Paul (2013) -
Directed self-assembly process integration – fin patterning
Sayan, Safak; Chan, BT; Marzook, Taisir; Vandenbroeck, Nadia; Altamirano Sanchez, Efrain; Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina (2015) -
Electrical verification of contact holes obtained with DSA of BCP
Rincon Delgadillo, Paulina; Bekaert, Joost; Vandenbroeck, Nadia; Gronheid, Roel; Chan, BT; van der Veen, Marleen; Vandersmissen, Kevin; Boemmels, Juergen; Luong, Vihn (2015) -
Enabling CD SEM metrology for 5nm technology node and beyond
Lorusso, Gian; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Boemmels, Juergen; Wilson, Chris; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnemont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru (2017) -
EUV lithography and the materials that propel it forward
Gallagher, Emily; Hendrickx, Eric; Kim, Ryan Ryoung han; Leray, Philippe; Philipsen, Vicky; Pollentier, Ivan; Rincon Delgadillo, Paulina; Ronse, Kurt; Timmermans, Marina; De Simone, Danilo (2020) -
Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures
Blachut, Gregory; Sirard, Stephen; Liang, Andrew; Mack, Chris; Maher, Michael; Rincon Delgadillo, Paulina; Chan, BT; Mannaert, Geert; Vandenberghe, Geert; Willson, Grant; Ellison, Christopher; Hymes, Diane (2018) -
Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern
Gronheid, Roel; Rincon Delgadillo, Paulina; Younkin, Todd; Pollentier, Ivan; Somervell, Mark; Hooge, Joshua S.; Nafus, Kathleen; Nealey, Paul F. (2012) -
Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Doxastakis, Manolis; Suh, Hyo Seon; Chen, Xuanxuan; Rincon Delgadillo, Paulina; Wan, Lingshu; Williamson, Lance; Jiang, Zhang; Strzalka, Joseph; Wang, Jin; Chen, Wei; Ferrier, Nicola; Ramirez-Hernandez, Abelardo; de Pablo, Juan; Gronheid, Roel; Nealey, Paul (2015) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2013) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2014) -
Imec's defect reduction strategies for EUV single exposed 32nm pitch line and space patterns
Foubert, Philippe; De Bisschop, Peter; Bekaert, Joost; Beral, Christophe; Rincon Delgadillo, Paulina (2019) -
Impact of annealing temperature on DSA process: toward faster assembly kinetics
Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke (2018) -
Impact of DSA process variability on circuit performance
Karageorgos, Ioannis; Doise, Jan; Rincon Delgadillo, Paulina; Stucchi, Michele; Baert, Rogier; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Dehaene, Wim (2016-10) -
Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning
Vanelderen, Pieter; Blanco, Victor; Mao, Ming; Tomczak, Yoann; De Roest, David; Kissoon, Nicola; Rincon Delgadillo, Paulina; Rispens, Gijsbert; Schiffelers, Guido; Pathak, Abhinav; Lazzarino, Frederic; De Simone, Danilo; De Poortere, Etienne; Mc Manus, Moyra; Piumi, Daniele; Hendrickx, Eric; Vandenberghe, Geert (2019) -
Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen; Cao, Yi; Lin, Guanyang (2012) -
Implementation of DSA for electrical test vehicles at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Rincon Delgadillo, Paulina; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Sayan, Safak; Lin, Guanyang (2015) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd (2012) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen (2012) -
Implementation of self-assembly in a 300mm processing environment
Gronheid, Roel; Singh, Arjun; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd (2012) -
Inspection of directed self assembly defects
Ito, Chikashi; Durant, Stephane; Lange, Steve; Harukawa, Ryota; Miyagi, Takemasa; Nagaswami, Venkat; Rincon Delgadillo, Paulina; Gronheid, Roel; Nealey, Paul (2014)