Browsing by author "Schreutelkamp, Rob"
Now showing items 21-30 of 30
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Leakage current control in recessed SiGe source/drain junctions
Claeys, Cor; Bargallo Gonzalez, Mireia; Eneman, Geert; Verheyen, Peter; Bender, Hugo; Schreutelkamp, Rob; Washington, L.; Nouri, F.; Simoen, Eddy (2007) -
Manufacturable processes for =32-nm-node CMOS enhancement by synchronous optimization of strain-engineered channel and external parasitic resistances
Noori, Atif; Balseanu, Mihaela; Boelen, Pieter; Cockburn, Andrew; Demuynck, Steven; Felch, Susan; Gandikota, Srinivas; Gelatos, jerry; Khandelwal, Amit; Kittl, Jorge; Lauwers, Anne; Lee, Wen-Chin; Lei, Jianxin; Mandrekar, Tushar; Schreutelkamp, Rob; Shah, Kavita; Thompson, Scott; Verheyen, Peter; Wang, Ching-Ya; Xia, Li-Qun; Arghavani, Reza (2008) -
Micro-bridge defects: characterization and root cause analysis
Santoro, Gaetano; Van Den Heuvel, Dieter; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Jehoul, Christiane; Schreutelkamp, Rob; Hillel, Noam (2010) -
Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements
Pérez-Rodríguez, A.; Roca, Elisenda; Jawhari, T.; Morante, J. R.; Schreutelkamp, Rob (1994) -
Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
Roca, Elisenda; Vanhellemont, Jan; Schreutelkamp, Rob; Vermeiren, Jan (1994) -
O2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory
Rothschild, Aude; Breuil, Laurent; Van den Bosch, Geert; Richard, Olivier; Conard, Thierry; Franquet, Alexis; Cacciato, Antonio; Debusschere, Ingrid; Jurczak, Gosia; Van Houdt, Jan; Kittl, Jorge; Ganguly, Udayan; Date, Lucien; Boelen, Pieter; Schreutelkamp, Rob (2009) -
Scaling down of MOCVD HfSiON to 1nm EOT
Shi, Xiaoping; Rothschild, Aude; Everaert, Jean-Luc; Van Elshocht, Sven; Date, Lucien; Schreutelkamp, Rob; Schaekers, Marc (2007-10) -
Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology
Ortolland, Claude; Rosseel, Erik; Horiguchi, Naoto; Kerner, Christoph; Mertens, Sofie; Kittl, Jorge; Verleysen, Eveline; Bender, Hugo; Vandervorst, Wilfried; Lauwers, Anne; Absil, Philippe; Biesemans, Serge; Mathukrishnan, S.; Srinivasan, S.; Mayur, A.J.; Schreutelkamp, Rob; Hoffmann, Thomas Y. (2009) -
Study of Ni-Silicide contacts to Si:C source/drain
Cho, Moon Ju; Nouri, F.; Schreutelkamp, Rob; Kim, Y.; Mertens, Sofie; Verheyen, Peter; Steenbergen, Johnny; Vrancken, Christa; Richard, Olivier; Tokei, Zsolt; Lauwers, Anne; Bender, Hugo; Van Daele, Benny; Vandervorst, Wilfried; Geenen, Luc; Absil, Philippe; Kubicek, Stefan; Demeurisse, Caroline (2007) -
Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
Rothschild, Aude; Kraus, P.A.; Chua, T.C.; Nouri, F.; Cubaynes, Florence; Veloso, Anabela; Mertens, Sofie; Date, Lucien; Schreutelkamp, Rob; Schaekers, Marc (2004)