Browsing by author "Milenin, Alexey"
Now showing items 21-40 of 77
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Effect of quartz window temperature on plasma composition during STI etch
Danilkin, Evgeny; Shamiryan, Denis; Baklanov, Mikhaïl; Milenin, Alexey; Boullart, Werner; Krasnikov, G.; Gutschin, O; Mochalov, A (2008) -
Fabrication challenges and opportunities for high-mobility materials: from CMOS applications to emerging derivative technologies
Collaert, Nadine; Alian, AliReza; De Jaeger, Brice; Peralagu, Uthayasankaran; Vais, Abhitosh; Walke, Amey; Witters, Liesbeth; Yu, Hao; Capogreco, Elena; Devriendt, Katia; Hopf, Toby; Kenis, Karine; Mannaert, Geert; Milenin, Alexey; Peter, Antony; Sebaai, Farid; Teugels, Lieve; van Dorp, Dennis; Wostyn, Kurt; Horiguchi, Naoto; Waldron, Niamh (2019-03) -
Ferroelectric FET with Gd-doped HfO2: A Step Towards Better Uniformity and Improved Memory Performance
Ronchi, Nicolo; Ragnarsson, Lars-Ake; Breuil, Laurent; Banerjee, Kaustuv; McMitchell, Sean; O'Sullivan, Barry; Milenin, Alexey; Kundu, Shreya; Pak, Murat; Van den Bosch, Geert; Van Houdt, Jan (2021) -
First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drain
Mitard, Jerome; Witters, Liesbeth; Arimura, Hiroaki; Sasaki, Yuichiro; Milenin, Alexey; Loo, Roger; Hikavyy, Andriy; Eneman, Geert; Lagrain, Pieter; Mertens, Hans; Sioncke, Sonja; Vrancken, Christa; Bender, Hugo; Barla, Kathy; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine; Thean, Aaron (2014) -
First demonstration of ferroelectric Si:Hf0(2) based 3D FE-FET with trench architecture for dense non-volatile memory application
Banerjee, Kaustuv; Breuil, Laurent; Milenin, Alexey; Pak, Murat; Stiers, Jimmy; McMitchell, Sean; Di Piazza, Luca; Van den Bosch, Geert; Van Houdt, Jan (2021) -
First demonstration of strained Ge-in-STI IFQW pFETs featuring raised SiGe75% S/D, replacement metal gate and germanided local interconnects
Mitard, Jerome; Witters, Liesbeth; Vincent, Benjamin; Franco, Jacopo; Favia, Paola; Hikavyy, Andriy; Eneman, Geert; Loo, Roger; Brunco, David; Kabir, Nafees; Bender, Hugo; Sebaai, Farid; Vos, Rita; Mertens, Paul; Milenin, Alexey; Vecchio, Emma; Ragnarsson, Lars-Ake; Collaert, Nadine; Thean, Aaron (2013) -
First demonstration of vertically stacked gate-all-around highly strained germanium nanowire pFETs
Capogreco, Elena; Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Eneman, Geert; Favia, Paola; Bender, Hugo; Wostyn, Kurt; Dentoni Litta, Eugenio; Schulze, Andreas; Vrancken, Christa; Opdebeeck, Ann; Mitard, Jerome; Langer, Robert; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2018-11) -
First demonstration of vertically-stacked gate-all-around highly-strained germanium nanowire p-FETs
Capogreco, Elena; Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Porret, Clément; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Eneman, Geert; Favia, Paola; Bender, Hugo; Wostyn, Kurt; Dentoni Litta, Eugenio; Schulze, Andreas; Vrancken, Christa; Opdebeeck, Ann; Mitard, Jerome; Langer, Robert; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2018) -
Fluorocarbon-based passivation in STI plasma etching
Milenin, Alexey; Athimulam, Raja; Demand, Marc; Coenegrachts, Bart (2012) -
Ge FET fabrication by plasma etch at 45nm pitch
Milenin, Alexey; Witters, Liesbeth (2014) -
Germanium for advanced CMOS transistors: status and trends of this technology
Mitard, Jerome; Witters, Liesbeth; Arimura, Hiroaki; Sasaki, Yuichiro; Milenin, Alexey; Loo, Roger; Hikavyy, Andriy; Eneman, Geert; Lagrain, Pieter; Mertens, Hans; Vrancken, Christa; Bender, Hugo; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine; Thean, Aaron (2015) -
Graphene electro-absorption modulators integrated at wafer-scale in a CMOS fab
Wu, Cheng Han; Brems, Steven; Yudistira, Didit; Cott, Daire; Milenin, Alexey; Vandersmissen, Kevin; Maestre, A.; Centero, A.; Van Campenhout, Joris; Huyghebaert, Cedric; Pantouvaki, Marianna (2021) -
Hetero Ge/SI and Si1-xGex/Si nanowires for vertical microelectronics devices
Iacopi, Francesca; Rooyackers, Rita; Vandooren, Anne; Vanherle, Wendy; Takeuchi, Shotaro; Hikavyy, Andriy; Loo, Roger; Milenin, Alexey; Leonelli, Daniele; Arstila, Kai; Bender, Hugo; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2009) -
III-V fin patterning in SADP scheme
Milenin, Alexey; Camerotto, Elisabeth; Sun, Noel; Boccardi, Guillaume; Vertommen, Johan; Piumi, Daniele (2016) -
In-situ spatial analysis of RF voltage during plasma etching
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert; Boullart, Werner (2008) -
In-situ spatial analysis of RF voltage during plasma etching
Milenin, Alexey; de Marneffe, Jean-Francois; Struyf, Herbert (2008) -
Influence of the top chamber window temperature on the STI etch process
Shamiryan, Denis; Danilkin, Evgeny; Tinck, Stefan; Klick, Michael; Milenin, Alexey; Baklanov, Mikhaïl; Boullart, Werner (2010) -
Integration aspects of strained Ge pFETs
Witters, Liesbeth; Eneman, Geert; Mitard, Jerome; Vincent, Benjamin; Loo, Roger; Hikavyy, Andriy; Milenin, Alexey; Mertens, Sofie; Thean, Aaron; Collaert, Nadine (2013) -
Integration aspects of strained Ge pFETs
Witters, Liesbeth; Eneman, Geert; Mitard, Jerome; Vincent, Benjamin; Loo, Roger; Hikavyy, Andriy; Milenin, Alexey; Mertens, Sofie; Thean, Aaron; Collaert, Nadine (2014-08) -
Low-loss, low-temperature PVD SiN waveguides
Golshani, Negin; Witters, Thomas; McGurk, John; De Heyn, Peter; De Coster, Jeroen; Milenin, Alexey; Thiam, Arame; Mingardi, Andrea; Verheyen, Peter; Pantouvaki, Marianna; Van Campenhout, Joris (2021)