Browsing by author "Van Huylenbroeck, Stefaan"
Now showing items 21-40 of 94
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Cost comparison of different TSV implementation options
Velenis, Dimitrios; Van Huylenbroeck, Stefaan; Heylen, Nancy; Vandersmissen, Kevin; Jourdain, Anne; Miller, Andy; Beyne, Eric (2016) -
Cost components for 3D system integration
Velenis, Dimitrios; Detalle, Mikael; Van Huylenbroeck, Stefaan; Jourdain, Anne; Phommahaxay, Alain; Slabbekoorn, John; Wang, Teng; Rebibis, Kenneth June; Marinissen, Erik Jan; Miller, Andy; Beyer, Gerald; Beyne, Eric (2014) -
Cu seeding using electroless deposition on Ru liner for high aspect ratio through-Si vias
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Vandersmissen, Kevin; Van Huylenbroeck, Stefaan; Struyf, Herbert; Tanaka, Tetsu (2014) -
Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology
Van Wichelen, Koen; Ong, Patrick; Moussa, Alain; Radisic, Dunja; Devriendt, Katia; Halder, Sandip; Kenis, Karine; Lee, Willie; Vandevelde, Bart; Soonekindt, Christophe; Shahar, Abdul Hadi; Smet, Tom; Van Huylenbroeck, Stefaan; Decoutere, Stefaan; Seacrist, Mike; Ries, Mike; Drobny, Vladimir; Wise, Rick (2009) -
Demonstration of a cost effective Cu electroless TSV metallization scheme
Vandersmissen, Kevin; Inoue, Fumihiro; Velenis, Dimitrios; Li, Yunlong; Dictus, Dries; Frees, Bart; Van Huylenbroeck, Stefaan; Kondo, M.; Seino, T.; Heylen, Nancy; Struyf, Herbert; van der Veen, Marleen (2015) -
Development of glyoxylic acid based electroless copper deposition on ruthenium
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu; Shingubara, Shoso (2014) -
Development of glyoxylic acid based electroless copper deposition on ruthenium
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu (2015) -
Dielectric liner reliability in via-middle through silicon vias with 3 micron diameter
Li, Yunlong; Van Huylenbroeck, Stefaan; Roussel, Philippe; Brouri, Mohand; Gopinath, Sanjaj; M. Anjos, Daniela; Thorum, Matthew; Yu, Jengyi; Beyer, Gerald; Beyne, Eric; Croes, Kristof (2016) -
Dielectric reliability of highly scaled through silicon via for wafer level 3D-SoC applications
Li, Yunlong; Van Huylenbroeck, Stefaan; De Vos, Joeri; Wu, Chen; Stucchi, Michele; Croes, Kristof; Van der Plas, Geert; Beyer, Gerald; Beyne, Eric (2018) -
Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology
Put, Sofie; Simoen, Eddy; Van Huylenbroeck, Stefaan; Claeys, Cor; Van Uffelen, Nick; Leroux, P. (2008) -
Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13um SiGe:C NPN HBT technology
Put, Sofie; Simoen, Eddy; Van Huylenbroeck, Stefaan; Claeys, Cor; Van Uffelen, Marco; Leroux, Paul (2009) -
Electroless Cu seed on Ru and Co liners in high aspect ratio TSV
Inoue, Fumihiro; Philipsen, Harold; Van Huylenbroeck, Stefaan; van der Veen, Marleen; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2014) -
Etch process modules development and integration in 3D SOC applications
Tutunjyan, Nina; Sardo, Stefano; De Vos, Joeri; Van Huylenbroeck, Stefaan; Jourdain, Anne; Peng, Lan; Inoue, Fumihiro; Rassoul, Nouredine; Beyer, Gerald; Beyne, Eric; Miller, Andy; Piumi, Daniele; Walsby, Edward; Ansell, Oliver; Ashraf, Huma; Thomas, Dave (2017) -
Etch process modules development and integration in 3D-SOC applications
Tutunjyan, Nina; Sardo, Stefano; De Vos, Joeri; Van Huylenbroeck, Stefaan; Jourdain, Anne; Peng, Lan; Inoue, Fumihiro; Rassoul, Nouredine; Beyer, Gerald; Beyne, Eric; Miller, Andy; Piumi, Daniele (2018) -
Glyoxylic acid as reducing agent for electroless copper deposition on cobalt liner
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Tanaka, Tetsu (2014) -
Glyoxylic acid as reducing agent for electroless copper deposition on cobalt liner
Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu (2015) -
Half-terahertz silicon/germanium heterojunction bipolar technologies: A TCAD based device architecture exploration
Sibaja-Hernandez, Arturo; You, Shuzhen; Van Huylenbroeck, Stefaan; Venegas, Rafael; De Meyer, Kristin; Decoutere, Stefaan (2011) -
High performance modules for integrated passives in silicon technologies
Jenei, Snezana; Decoutere, Stefaan; Van Huylenbroeck, Stefaan; Vanhorebeek, Guido; Nauwelaers, Bart (2001) -
High Q inductors and capacitors on Si substrate
Jenei, Snezana; Decoutere, Stefaan; Van Huylenbroeck, Stefaan; Vanhorebeek, Guido; Nauwelaers, Bart (2001) -
High-speed TSV integration in an active silicon photonics interposer platform
Bogaerts, Lieve; El-Mekki, Zaid; Van Huylenbroeck, Stefaan; Nolmans, Philip; Pantano, Nicolas; Sun, Xiao; Rakowski, Michal; Velenis, Dimitrios; Verheyen, Peter; Balakrishnan, Sadhishkumar; De Heyn, Peter; Ban, Yoojin; Srinivasan, Ashwyn; Lardenois, Sebastien; De Coster, Jeroen; Detalle, Mikael; Absil, Philippe; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris (2018)