Browsing by author "Pacco, Antoine"
Now showing items 41-59 of 59
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Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2009) -
Nanoparticle removal with megasonics: A review
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Kim, Tae-Gon; Xu, XiuMei; Wostyn, Kurt; Mertens, Paul; De Gendt, Stefan (2014) -
Non-destructive characterization of extended crystalline defects in confined semiconductor device structures
Schulze, Andreas; Strakos, Libor; Vystavel, Tomas; Loo, Roger; Pacco, Antoine; Collaert, Nadine; Vandervorst, Wilfried; Caymax, Matty (2018) -
Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.
Pacco, Antoine; Dattilo, Davide; Jonckheere, Rik; Rip, Jens; Dietze, Uwe; Kruemberg, Jens; Holsteyns, Frank (2016) -
Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching
Erofeev, Ivan; Mareum Khan, Muhaimin; Aabdin, Zainul; Ray Chowdhuri, Angshuman; Pacco, Antoine; Philipsen, Harold; Holsteyns, Frank; Mirsaidov, Utkur (2023-08) -
Recess metrology challenges for 3D device architectures in advanced technology nodes
Santoro, Gaetano; Houchens, Kevin; Bogdanowicz, Janusz; Elizov, Moshe; Yaron, Lior; Chemama, Michael; Goldenshtein, Alex; Zakay, Amit; Amit, Noam; Briggs, Basoene; Pacco, Antoine; Delhougne, Romain; Cockburn, Andrew; Abramovitz, Yaniv; Tam, Aviram; Adan, Ofer; Mertens, Hans; Charley, Anne-Laure; Horiguchi, Naoto; Leray, Philippe; Lorusso, Gian (2022) -
Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology
Chew, Soon Aik; Demuynck, Steven; Zhang, Liping; Pacco, Antoine; Devriendt, Katia; Teugels, Lieve; Hopf, Toby; Versluijs, Janko; Vrancken, Christa; Dangol, Anish; Altamirano Sanchez, Efrain; Mocuta, Dan; Horiguchi, Naoto (2018) -
Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants
Pacco, Antoine; Tao, Zheng; Rip, Jens; van Dorp, Dennis; Philipsen, Harold; Holsteyns, Frank (2019) -
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
Pacco, Antoine; Holsteyns, Frank; Schaekers, Marc; Everaert, Jean-Luc; Dictus, Dries; Cuypers, Daniel (2018) -
Selective wet-etching of silicon germanium in composite vertical nanowires
Baraissov, Zhaslan; Pacco, Antoine; Koneti, Siddardha; Bisht, Geeta; Panciera, Federico; Holsteyns, Frank; Mirsaidov, Utkur (2019) -
Study of cobalt wet recess for fully self aligned vias in advanced interconnects
Akanishi, Yuya; Pacco, Antoine; Holsteyns, Frank (2019) -
Study of the anisotropic wet etching of nanoscale structures in alkaline solutions
Pacco, Antoine; Aabdin, Zainul; Anand, Utkarsh; Rip, Jens; Mirsaidov, Utkur; Holsteyns, Frank (2018) -
The influence of dissolved carbon dioxide on cavitation intensity in ultrasound cleaning systems
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Struyf, Herbert; Mertens, Paul; Gottschalk, Christiane; De Gendt, Stefan (2013) -
Towards reduced impact of EUV mask defectivity on wafer
Jonckheere, Rik; Van Den Heuvel, Dieter; Pacco, Antoine; Pollentier, Ivan; Baudemprez, Bart; Jehoul, Christiane; Hermans, Jan; Hendrickx, Eric (2014-07) -
Uniformity of particle removal by aerosol spray
Xu, XiuMei; Pacco, Antoine; Wada, Masayuki; Leunissen, Peter; Struyf, Herbert; Mertens, Paul (2010) -
Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept
Abrenica, Graniel; Lebedev, Mikhail; Pacco, Antoine; Calvet, Wolfram; Mayer, Thomas; van Dorp, Dennis (2019) -
Wet defect etching for defect reveal in epitaxial Ge
Pacco, Antoine; Schulze, Andreas; Caymax, Matty; Holsteyns, Frank; De Gendt, Stefan; De Keyzer, Ellen (2015) -
Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects
Le, Quoc Toan; Kesters, Els; Usman Ibrahim, Ansar; Klipp, Andreas; Pacco, Antoine; van der Veen, Marleen; Altamirano Sanchez, Efrain; Holsteyns, Frank (2020) -
Will cleaning technologies break through the red brick wall?
Pacco, Antoine; Kim, Tae-Gon; Mertens, Paul (2009-10)