Browsing by author "Bekaert, Joost"
Now showing items 41-60 of 125
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Experimental study of sub-DSA resolution assist features (SDRAF)
Yi, Linda; Bekaert, Joost; Gronheid, Roel; Vandenberghe, Geert; Nafus, Kathleen; Wong, H.-S. Philip (2015) -
Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Hsu, Stephen; Liu, Hua Yu; Mouraille, Orion; Schreel, Koen; Dusa, Mircea; Zimmermann, Joerg; Gräupner, Paul; Neumann, Jens Timo (2011-03) -
Extreme scaling of optical lithography: overview of process integration issues
Ronse, Kurt; Wiaux, Vincent; Verhaegen, Staf; Van Look, Lieve; Bekaert, Joost; Laidler, David; Cheng, Shaunee; Maenhoudt, Mireille; Vandenberghe, Geert; Dusa, Mircea (2009) -
Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Baron, S.; Tsai, M.-C.; Ning, K.; Hsu, S.; Liu, H.Y.; Mulder, M.; Bouma, A.; van der Heijden, E.; Mouraille, O.; Schreel, K.; Finders, Jo; Dusa, Mircea; Zimmerman, J.; Graeupner, Paul; Neumann, J.T.; Hennerkes, C. (2010) -
Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Mulder, M.; Baron, Stanislas; Tsai, Min-Chun; Ning, Kai; Hsu, Stephen; Bouma, A.; van der Heijden, E.; Schreel, Koen; Carpaij, R.; Dusa, Mircea; Zimmerman, Joerg; Graeupner, Paul; Hennerkes, Christoph (2009) -
Fully controlled precessional switching of a macrospin in a cross-wire geometry
Hiebert, Wayne; Lagae, Liesbet; Das, Johan; Bekaert, Joost; Wirix-Speetjens, Roel; Van Dorpe, Pol; De Boeck, Jo (2002) -
Fully controlled precessional switching of a macrospin in a cross-wire geometry
Hiebert, Wayne; Lagae, Liesbet; Das, Johan; Bekaert, Joost; Wirix-Speetjens, Roel; De Boeck, Jo (2003) -
Hall magnetometry of superconducting microstructures
Bekaert, Joost; Morelle, M.; Pogosov, W.V.; Borghs, Gustaaf; Moshchalkov, V.V. (2004) -
Hall probe microscopy
Bekaert, Joost; De Boeck, Jo; Borghs, Gustaaf; Van Bael, Marleen; Temst, K.; Moshchalkov, V. V.; Bruynseraede, Y. (2000) -
Hall probe microscopy of nanostructured magnetic and superconducting materials
Bekaert, Joost (2002-05) -
High-speed full 3D feature metrology for litho monitoring, matching and model calibration with scatterometry
Cramer, H.; Chen, An; Li, Frank; Leray, Philippe; Charley, Anne-Laure; Van Look, Lieve; Bekaert, Joost; Cheng, Shaunee (2012) -
Imec's defect reduction strategies for EUV single exposed 32nm pitch line and space patterns
Foubert, Philippe; De Bisschop, Peter; Bekaert, Joost; Beral, Christophe; Rincon Delgadillo, Paulina (2019) -
Immersion lithography and double patterning in advanced microelectronics
Vandeweyer, Tom; Bekaert, Joost; Ercken, Monique; Gronheid, Roel; Miller, Andy; Truffert, Vincent; Verhaegen, Staf; Versluijs, Janko; Wiaux, Vincent; Wong, Patrick; Vandenberghe, Geert; Maenhoudt, Mireille (2010) -
Impact of EUV resist thickness on local critical dimension uniformities for sub-30 nm CD Via Patterning
Vincent, Benjamin; Maslow, Mask; Bekaert, Joost; Mao, Ming; Ervin, Joseph (2020) -
Impact of hyper-NA reticle properties on ArF immersion lithography
Leunissen, Peter; Ronse, Kurt; Philipsen, Vicky; Jonckheere, Rik; Aksenov, Yuri; Bekaert, Joost (2004-12) -
Impact of local variability on defect-aware process windows
Maslow, Mark John; Yaegashi, Hidetami; Frommhold, Andreas; Schiffelers, Guido; Wahlisch, Felix; Rispens, Gijsbert; Slachter, Bram; Yoshida, Keisuke; Hara, Arisa; Oikawa, Noriaki; Pathak, Abhinav; Cerbu, Dorin; Hendrickx, Eric; Bekaert, Joost (2019) -
Impact of template shape on pattern placement and CDU for grapho-epitaxy DSA
Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Gronheid, Roel; De Gendt, Stefan (2016) -
Implementation of DSA for electrical test vehicles at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Rincon Delgadillo, Paulina; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Sayan, Safak; Lin, Guanyang (2015) -
Implementation of surface energy modification in grapho-epitaxy directed self-assembly for hole multiplication
Doise, Jan; Gronheid, Roel; Bekaert, Joost; Chan, BT; Cao, Yi; Guanyang, Lin (2015) -
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; Cao, Yi; Hong, Sung Eun; Lin, Guanyang; Fishman, Daniel; Chakk, Yuli; Marzook, Taisir (2015)