Browsing imec Publications by author "Iacopi, Francesca"
Now showing items 1-20 of 102
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A 35nm diameter vertical silicon nanowire short-gate tunnelFET
Vandooren, Anne; Rooyackers, Rita; Leonelli, Daniele; Iacopi, Francesca; De Gendt, Stefan; Verhulst, Anne; Heyns, Marc; Kunnen, Eddy; Nguyen, Duy; Demand, Marc; Ong, Patrick; Lee, Willie; Moonens, Jos; Richard, Olivier; Vandenberghe, William; Groeseneken, Guido (2009) -
A new ultra-low K ILD material based on organic-inorganic hybrid resins
Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002) -
A study of plasma-enhanced CVD growth of Si nanowires catalyzed by indium
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Detavernier, Christophe; Griffiths, Hefin (2007) -
Aggressive scaling of Cu lowk: impact on metrology
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald (2005) -
Alternative catalysts for si-technology compatible growth of si nanowires
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007) -
Alternative catalysts for Si-technology compatible growth of Si nanowires
Iacopi, Francesca; Vereecken, Philippe; Schaekers, Marc; Caymax, Matty; Moelans, Nele; Blanpain, Bart; Detavernier, C.; D'Haen, Jan; Griffiths, Hefin (2007) -
An optimized process for the production of advanced planar wire grid plates as detectors for high energy physics experiments
Iacopi, Francesca; Devroede, Olivier; Pins, Rolande; Van Hoof, Rita; Honoré, Mia; Zhukov, V.; Van Lancker, L.; Van Doninck, W.; Beyne, Eric (2001) -
Barrier deposition on porous low-k films
Shamiryan, Denis; Yanovitskaya, Z.S.; Iacopi, Francesca; Maex, Karen (2003) -
Barrier process development for damascene integration of porous SiLK resin films
Tokei, Zsolt; Waeterloos, Joost; Iacopi, Francesca; Caluwaerts, Rudy; Struyf, Herbert; Van Aelst, Joke; Maex, Karen (2002) -
Barrier studies on porous silk semiconductor dielectric
Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Barriers for Cu/low k damascene structures
Maex, Karen; Tokei, Zsolt; Satta, Alessandra; Lanckmans, Filip; Wu, Wen; Iacopi, Francesca (2001) -
Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Iacopi, Francesca; Brongersma, Sywert; Maex, Karen; Abell, Thomas (2002) -
Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Iacopi, Francesca; Brongersma, Sywert; Abell, Thomas; Maex, Karen (2003) -
Calculation of the Au-Ge phase diagram for nanoparticles
Eichhammer, Yann; Roeck, Joris; Moelans, Nele; Iacopi, Francesca; Blanpain, Bart; Heyns, Marc (2008) -
Calculation of thermodynamic equilibrium conditions between a liquid nanoparticle and a solid nanowires
Eichhammer, Yann; Moelans, Nele; Iacopi, Francesca; Blanpain, Bart; Heyns, Marc (2009) -
Challenges for structural stability of ultra-low-k based interconnects
Iacopi, Francesca; Brongersma, Sywert; Vandevelde, Bart; Travaly, Youssef; Maex, Karen (2004) -
Challenges in the implentation of low-k dielectrics in the back-end of line
Hoofman, Romano; Brom - Verheyden, Greja; Michelon, Julien; Iacopi, Francesca; Travaly, Youssef; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2005) -
Challenges of clean/strip processing for Cu/LowK technology
Baklanov, Mikhaïl; Le, Quoc Toan; Kesters, Els; Iacopi, Francesca; Van Aelst, Joke; Struyf, Herbert; Boullart, Werner; Vanhaelemeersch, Serge; Maex, Karen (2004) -
Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Das, Arabinda; Kokubo, Terukazu; Furukawa, Yukiko; Struyf, Herbert; Vos, Ingrid; Sijmus, Bram; Iacopi, Francesca; Van Aelst, Joke; Le, Quoc Toan; Carbonell, Laure; Brongersma, Sywert; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Sleeckx, Erik; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Rosseel, Erik; Van Hove, Marleen; Vanhaelemeersch, Serge; Shiota, A.; Maex, Karen (2002) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003)