EISBN
978-1-5106-4553-0
ISBN
978-1-5106-4552-3
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
SPIE Proceedings; Volume 11854,
Volume
11854
Title
Analysis of advanced technology nodes and h-NA EUV introduction: a cost perspective
Publication type
Proceedings paper