Browsing Conference contributions by imec author "1ceb578e0757c72cab376a17ac4cb038206bbcb2"
Now showing items 1-18 of 18
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Air-gap formation by UV-assisted decomposition of CVD material
Pantouvaki, Marianna; Humbert, Aurelie; Van Besien, Els; Camerotto, Elisabeth; Travaly, Youssef; Richard, Olivier; Willegems, Myriam; Volders, Henny; Kellens, Kristof; Daamen, Roel; Hoofman, Romano; Beyer, Gerald (2008) -
Enhancement of acoustic heating during nucleation of acoustic cavitation inside an ultrasonic reactor cavity
Hauptmann, Marc; Brems, Steven; Camerotto, Elisabeth; Xu, XiuMei; Struyf, Herbert; Mertens, Paul; Heyns, Marc; De Gendt, Stefan; Glorieux, Christ; Lauriks, Walter (2010) -
Generation of plama in liquid using RF and ultrasounds
Camerotto, Elisabeth; De Schepper, Peter; Callant, Ivan; Shamiryan, Denis; Boullart, Werner; De Gendt, Stefan (2011) -
III-V fin patterning in SADP scheme
Milenin, Alexey; Camerotto, Elisabeth; Sun, Noel; Boccardi, Guillaume; Vertommen, Johan; Piumi, Daniele (2016) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Impact of acoustical reflections on megasonic cleaning performance
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Halder, Sandip; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul (2009) -
Influence of dissolved CO2 on bubble activity in pulsed acoustic fields
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Struyf, Herbert; Heyns, Marc; Mertens, Paul; De Gendt, Stefan; Gottschalk, Christiane (2013) -
Influence of gas type on ultrasound cleaning efficiency
Brems, Steven; Camerotto, Elisabeth; Hauptmann, Marc; Kim, Tae-Gon; Struyf, Herbert; Mertens, Paul; Heyns, Marc; De Gendt, Stefan (2010) -
Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning
Hauptmann, Marc; Brems, Steven; Camerotto, Elisabeth; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul; Lauriks, Walter (2009) -
Key factors to sustain the extension of a MHM-based integration scheme to medium and high porosity PECVD low-k materials
Travaly, Youssef; Van Aelst, Joke; Truffert, Vincent; Verdonck, Patrick; Dupont, Tania; Camerotto, Elisabeth; Richard, Olivier; Bender, Hugo; Croes, Kristof; De Roest, David; Vereecke, Guy; Claes, Martine; Le, Quoc Toan; Kesters, Els; Van Cauwenberghe, Marc; Beynet, Julien; Kaneko, S.; Struyf, Herbert; Baklanov, Mikhaïl; Matsushita, K.; Kobayashi, N.; Sprey, Hessel; Beyer, Gerald (2008) -
N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma
Tao, Zheng; Vos, Ingrid; Altamirano Sanchez, Efrain; Xu, Kaidong; Hellin, David; Camerotto, Elisabeth; Jumel, Helene; Titus, Monica (2014) -
Optimizing high frequency ultrasound cleaning in the semiconductor industry
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2012) -
Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets
Ramesh, Siva; Ivanov, Tsvetan; Putcha, Vamsi; Alian, AliReza; Sibaja-Hernandez, Arturo; Rooyackers, Rita; Camerotto, Elisabeth; Milenin, Alexey; Pinna, Nicolo; El Kazzi, Salim; Veloso, Anabela; Lin, Dennis; Lagrain, Pieter; Favia, Paola; Collaert, Nadine; De Meyer, Kristin (2017) -
Stroboscopic Schlieren study of bubble formation during megasonic agitation
Hauptmann, Marc; Brems, Steven; Camerotto, Elisabeth; Mertens, Paul; Heyns, Marc; De Gendt, Stefan; Glorieux, Christ; Lauriks, Walter (2010) -
The importance of cavitation hysteresis in megasonic cleaning
Camerotto, Elisabeth; De Gendt, Stefan; Hauptmann, Marc; Shamiryan, Denis; Heyns, Marc; Mertens, Paul; Brems, Steven (2010) -
The influence of the angle of incidence in megasonic cleaning
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Xu, XiuMei; De Gendt, Stefan; Heyns, Marc; Mertens, Paul (2010) -
Top-down InGaAs nanowire and Fin vertical FETs with record performance
Ramesh, Siva; Ivanov, Tsvetan; Camerotto, Elisabeth; Sun, N.; Franco, Jacopo; Sibaja-Hernandez, Arturo; Rooyackers, Rita; Alian, AliReza; Loo, Josine; Veloso, Anabela; Milenin, Alexey; Lin, Dennis; Favia, Paola; Bender, Hugo; Collaert, Nadine; Thean, Aaron; De Meyer, Kristin (2016) -
Towards an improved megasonic cleaning process: influence of surface tension on bubble activity in acoustic fields
Camerotto, Elisabeth; Brems, Steven; Hauptmann, Marc; Lurquin, Jelle; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2013)