Browsing Conference contributions by imec author "823a379c6cab91e5056929f33191723c3b43ad66"
Now showing items 1-20 of 50
-
3D imaging of atom probe tip shapes with atomic force microscopy
Fleischmann, Claudia; Paredis, Kristof; Melkonyan, Davit; Op de Beeck, Jonathan; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A combined SPM/TOFSIMS tool to obtain real chemical 3D information
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried (2017) -
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A layer-by-layer reconstruction method including field of view effects, missing atoms and laser effects
Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; Vandervorst, Wilfried (2018) -
Accuracy in APT analysis: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried (2017) -
Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28) -
Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
Kundu, Paromita; Fleischmann, Claudia; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; van der Heide, Paul (2018) -
ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Hang Chun; Adelmann, Christoph; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, K.; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard; Schmeisser, Dieter; Tallarida, Massimo (2010) -
ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Dennis; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, Kristiaan; Vantomme, Andre; Beckhoff, Burkhard (2010) -
APT tip shape imaging by SPM
Op de Beeck, Jonathan; Fleischmann, Claudia; Paredis, Kristof; van der Heide, Paul; Vandervorst, Wilfried (2019) -
Atom probe tomography for advanced semiconductor technology research
Fleischmann, Claudia; Melkonyan, Davit; Arnoldi, Laurent; Morris, Richard; Bogdanowicz, Janusz; Vandervorst, Wilfried (2017) -
Challenges for APT in advanced semiconductor technology research
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Arnoldi, Laurent; Kumar, Arul; Vurpillot, Francois; Vandervorst, Wilfried (2016) -
Challenges on surface conditioning in 3D device architectures: triple-gate FinFETs, gate-all-around lateral and vertical nanowire FETs
Veloso, Anabela; Paraschiv, Vasile; Vecchio, Emma; Devriendt, Katia; Li, Waikin; Simoen, Eddy; Chan, BT; Tao, Zheng; Rosseel, Erik; Loo, Roger; Milenin, Alexey; Kunert, Bernardette; Teugels, Lieve; Sebaai, Farid; Lorant, Christophe; van Dorp, Dennis; Altamirano Sanchez, Efrain; Brus, Stephan; Marien, Philippe; Fleischmann, Claudia; Melkonyan, Davit; Huynh Bao, Trong; Eneman, Geert; Hellings, Geert; Sibaja-Hernandez, Arturo; Matagne, Philippe; Waldron, Niamh; Mocuta, Dan; Collaert, Nadine (2017) -
Correcting the boron concentration for the detection losses through multi hit events.
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
Melkonyan, Davit; Arnoldi, Laurent; Fleischmann, Claudia; Kumar, Arul; Vurpillot, Francois; Bogdanowicz, Janusz; Vandervorst, Wilfried (2016) -
Enabling the high-performance InGaAs/Ge CMOS: a common gate stack solution
Lin, Dennis; Brammertz, Guy; Sioncke, Sonja; Fleischmann, Claudia; Delabie, Annelies; Martens, Koen; Bender, Hugo; Conard, Thierry; Tseng, Joshua; Lin, Vic; Wang, Wei-E; Temst, Kristiaan; Vantomme, Andre; Mitard, Jerome; Caymax, Matty; Meuris, Marc; Heyns, Marc; Hoffmann, Thomas Y. (2009) -
Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology
Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021) -
Fundamental aspects of Arn+ SIMS profiling of common organic semiconductors
Fleischmann, Claudia; Conard, Thierry; Havelund, R.; Franquet, Alexis; Poleunis, C.; Voroshazi, Eszter; Delcorte, A.; Vandervorst, Wilfried (2013) -
G-SIMS analysis of organic solar cell materials
Franquet, Alexis; Fleischmann, Claudia; Conard, Thierry; Havelund, Rasmus; Poleunis, Claude; Voroshazi, Eszter; Delcorte, Arnaud; Vandervorst, Wilfried (2013) -
Grazing incidence X-ray fluorescence analysis for the characterization of Ge1-xSnx thin films
Hoenicke, Philipp; Fleischmann, Claudia; Hermann, Peter; Beckhoff, Burkhard (2014)