Recently added

The effect of forming gas annealing on capacitance-voltage hysteresis in the high- $j/In0.53Ga0.47As metal-oxide-semiconductor system

Lin, Jun; Monaghan, Scott; Cherkaoui, Karim; Povey, Ian M.; Sheehan, Brendan; Franco, Jacopo; Hurley, Paul K. (2016)

Post-CMP cleaners for tungsten at advanced nodes

Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2016)

Selective epitaxial growth (SEG) of p-GaN gate layer for enhancement mode GaN/AlGaN HEMT

Liang, Hu; Saripalli, Yoga; De Jaeger, Brice; Decoutere, Stefaan (2016)

p-GaN e-mode HEMT power device manufacturing on 200mm substrates using aixtron AIX G5+C MOCVD system

Liang, Hu; Posthuma, Niels; Eickelkamp, Martin; Fahle, Dirk; Van Hove, Marleen; Zhao, Ming; Decoutere, Stefaan; Langer, Robert (2016)

Accurate three-part WBC classification in an imaging flow cytometer based on lens-free holograms

Li, Yuqian; Vanmeerbeeck, Geert; Vercruysse, Dries; Dusa, Alexandra; Blaszkiewicz, Kamil; Sohn, Erik; Stahl, Richard; Lagae, Liesbet (2016)

Two-way-fed silicon-on-insulator grating couplers with a broad bandwidth

Li, YanLu; Vanslemsbrouck, Michael; Baets, Roel (2016)

All-dielectric nano-antennas for wavelength-controlled bidirectional scattering of visible light

Li, Jiaqi; Verellen, Niels; Boeckx, Stef; Vercruysse, Dries; Willems, Kherim; Neutens, Pieter; Bearda, Twan; Chen, Chang; Lagae, Liesbet; Van Dorpe, Pol (2016)

Extreme spectral transmission fluctuations in silicon nanowires induced by backscattering

Li, Ang; Xing, Yufei; Van Laer, Raphael; Baets, Roel; Bogaerts, Wim (2016-08)

A simple and novel method to obtain an FSR free silicon ring resonator

Li, Ang; Bogaerts, Wim (2016)

Multiplexed site-specific electrode functionalization by combining electrografting and click chemistry

Levrie, Karen; Jans, Karolien; Ardakanian, Niyousha; Verellen, Niels; Van Hoof, Chris; Lagae, Liesbet; Stakenborg, Tim (2016)

Impact of Mn-based barriers on dielectric breakdown voltage and capacitance

Lesniewska, Alicja; Wu, Chen; Jourdan, Nicolas; Briggs, Basoene; Boemmels, Juergen; Tokei, Zsolt; Croes, Kristof (2016)

Current and future requirements for metrology and inspection for advanced patterning

Leray, Philippe; Wong, Patrick; Halder, Sandip; Foubert, Philippe (2016)

Hybrid overlay metrology for high order correction by using CDSEM

Leray, Philippe; Halder, Sandip; Lorusso, Gian; Baudemprez, Bart; Inoue, Osamu; Okagawa, Yutaka (2016)

AlGaN/GaN power Schottky diodes with anode dimension up to 100 mm on 200 mm Si substrate

Lenci, Silvia; Hu, Jie; Ronchi, Nicolo; Decoutere, Stefaan (2016)

SIW cavity-backed slot (multi-)antenna systems for the next generation IoT applications

Lemey, Sam; Caytan, Olivier; Vande Ginste, Dries; Demeester, Piet; Rogier, Hendrik; Bozzi, M. (2016)

Introducing the EUV CNT pellicle

Lee, Jae Uk; Vanpaemel, Johannes; Pollentier, Ivan; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Timmermans, Marina; De Volder, Michael; Gallagher, Emily (2016)

Novel method to achieve area selective ALD on copper metal vs. SiO2using vapor-phase deposited SAMS

Lecordier, Laurent; Armini, Silvia (2016)

Porous dielectric materials for back-end-of-line interconnect

Le, Quoc Toan; Kesters, Els; Holsteyns, Frank (2016)

Characterization of etch residues generated on damascene structures

Le, Quoc Toan; Kesters, Els; Hoflijk, Ilse; Conard, Thierry; Shen, M.; Braun, S.; Burk, Y.; Holsteyns, Frank (2016)

Matlab to C compilation targeting application specific instruction set processors

Latifis, Ionannis; Parashar, Karthick; Dimitroulakos, Grigoris; Cappelle, Hans; Lezos, Christakis; Masselos, Konstantinos; Catthoor, Francky (2016)

Conference contributions: Recent submissions

The effect of forming gas annealing on capacitance-voltage hysteresis in the high- $j/In0.53Ga0.47As metal-oxide-semiconductor system ﻿

Post-CMP cleaners for tungsten at advanced nodes ﻿

Selective epitaxial growth (SEG) of p-GaN gate layer for enhancement mode GaN/AlGaN HEMT ﻿

p-GaN e-mode HEMT power device manufacturing on 200mm substrates using aixtron AIX G5+C MOCVD system ﻿

Accurate three-part WBC classification in an imaging flow cytometer based on lens-free holograms ﻿

Two-way-fed silicon-on-insulator grating couplers with a broad bandwidth ﻿

All-dielectric nano-antennas for wavelength-controlled bidirectional scattering of visible light ﻿

Extreme spectral transmission fluctuations in silicon nanowires induced by backscattering ﻿

A simple and novel method to obtain an FSR free silicon ring resonator ﻿

Multiplexed site-specific electrode functionalization by combining electrografting and click chemistry ﻿

Impact of Mn-based barriers on dielectric breakdown voltage and capacitance ﻿

Current and future requirements for metrology and inspection for advanced patterning ﻿

Hybrid overlay metrology for high order correction by using CDSEM ﻿

AlGaN/GaN power Schottky diodes with anode dimension up to 100 mm on 200 mm Si substrate ﻿

SIW cavity-backed slot (multi-)antenna systems for the next generation IoT applications ﻿

Introducing the EUV CNT pellicle ﻿

Novel method to achieve area selective ALD on copper metal vs. SiO2using vapor-phase deposited SAMS ﻿

Porous dielectric materials for back-end-of-line interconnect ﻿

Characterization of etch residues generated on damascene structures ﻿

Matlab to C compilation targeting application specific instruction set processors ﻿