Recently added

On-chip hybrid integration of silicon nitride microdisk with colloidal quantum dots

Xie, Weiqiang; Zhu, Yunpeng; Aubert, Tangi; Hens, Zeger; Brainis, Edouard; Van Thourhout, Dries (2015-08)

Nanodome coins for intracellular surface-enhanced raman spectroscopy

Wuytens, Pieter; De Vos, Winnok; Skirtach, A.; Baets, Roel (2015)

Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs

Wu, Tian-Li; Marcon, Denis; De Jaeger, Brice; Van Hove, Marleen; Bakeroot, Benoit; Stoffels, Steve; Groeseneken, Guido; Decoutere, Stefaan; Roelofs, Robin (2015)

The impact of the gate dielectric quality in developing Au-free D-mode and E-mode recessed gate AlGaN/GaN transistors on a 200mm Si substrate

Wu, Tian-Li; Marcon, Denis; De Jaeger, Brice; Van Hove, Marleen; Bakeroot, Benoit; Lin, Dennis; Stoffels, Steve; Kang, Xuanwu; Roelofs, Robin; Groeseneken, Guido; Decoutere, Stefaan (2015)

Selective etch of Si and SiGe for gate-all-around device architecture

Wostyn, Kurt; Sebaai, Farid; Rip, Jens; Mertens, Hans; Witters, Liesbeth; Loo, Roger; Hikavyy, Andriy; Milenin, Alexey; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; Mertens, Paul; De Gendt, Stefan; Holsteyns, Frank (2015-10)

Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance

Wostyn, Kurt; Rondas, Dirk; Loo, Roger; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Elskens, Wim; Vyncke, Alex; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; Masaoka, Toru; Yoshida, Yukifumi; Bast, Gerhard; Simpson, Gavin (2015)

Alternative materials for high numerical aperture extreme ultraviolet lithography mask stacks

Wood, Obert; Raghunathan, Sudhar; Mangat, Pawitter; Philipsen, Vicky; Luong, Vu; Kearney, Patrick; Verduijn, Erik; Kumar, Aditya; Patil, Suraj; Laubis, Christian; Soltwisch, Victor; Scholze, Frank (2015)

Non-contacting busbars for advanced cell structures using low temperature copper

Wood, D.; Kuzma Filipek, Izabela; Russell, Richard; Duerinckx, Filip; Powell, N.; Zambova, A.; Chislea, B.; Chevalier, P.; Boulord, C.; Beucher, A.; Zeghers, N.; Szlufcik, Jozef; Beaucarne, G. (2015)

Strained germanium quantum well p-FinFETs fabricated on 45nm fin pitch using replacement channel, replacement metal gate and germanide-free local interconnect

Witters, Liesbeth; Mitard, Jerome; Loo, Roger; Demuynck, Steven; Chew, Soon Aik; Schram, Tom; Tao, Zheng; Hikavyy, Andriy; Sun, Jianwu; Milenin, Alexey; Mertens, Hans; Vrancken, Christa; Favia, Paola; Schaekers, Marc; Bender, Hugo; Horiguchi, Naoto; Langer, Robert; Barla, Kathy; Mocuta, Dan; Collaert, Nadine; Thean, Aaron (2015)

Experimental verification of phase induced mask 3D effects in EUV imaging

Wittebrood, Friso; de Winter, Laurens; Last, Thorsten; Van Look, Lieve; Philipsen, Vicky; Finders, Jo; Schiffelers, Guido; Hendrickx, Eric (2015)

High chi block copolymers: a progress report

Willson, Grant; Blachut, Greg; Maher, Michael; Durand, William; Asano, Yusuke; Someya, Yasunobu; Gronheid, Roel; Sirard, Stephen; Ganesan, Venkat; Ellison, Christopher (2015)

Impact of BCP asymmetry on DSA patterning performance

Williamson, Lance; Kim, JiHoon; Cao, Yi; Lin, Guanyang; Gronheid, Roel; Nealey, Paul (2015)

Direct etched Cu characterization for advanced interconnects

Wen, Liang Gong; Yamashita, Fumiko; Tang, Baojun; Croes, Kristof; Tahara, Shigeru; Shimoda, Keiichi; Maeshiro, Takeru; Nishimura, Eiichi; Lazzarino, Frederic; Ciofi, Ivan; Boemmels, Juergen; Tokei, Zsolt (2015)

Impact of time-dependent variability on the yield and performance of 6T SRAM cells in an advanced HK/MG technology

Weckx, Pieter; Kaczer, Ben; Roussel, Philippe; Catthoor, Francky; Groeseneken, Guido (2015)

Characterization and simulation methodology for time-dependent variability in advanced technologies

Weckx, Pieter; Kaczer, Ben; Raghavan, Praveen; Franco, Jacopo; Simicic, Marko; Roussel, Philippe; Linten, Dimitri; Thean, Aaron; Verkest, Diederik; Catthoor, Francky; Groeseneken, Guido (2015)

Defect-centric perspective of combined BTI and RTN time-dependent variability

Weckx, Pieter; Kaczer, Ben; Franco, Jacopo; Roussel, Philippe; Bury, Erik; Subirats, Alexandre; Groeseneken, Guido; Catthoor, Francky; Linten, Dimitri; Raghavan, Praveen; Thean, Aaron (2015)

Characterization of time-dependent variability using 32k transistor arrays in advanced HK/MG technology

Weckx, Pieter; Kaczer, Ben; Chen, Chris; Franco, Jacopo; Bury, Erik; Chanda, Kaushik; Watt, J.; Roussel, Philippe; Catthoor, Francky; Groeseneken, Guido (2015)

Thermal etching of metal thin films using supercritical fluid

Watanabe, M.; Nakamura, Y.; Kondoh, E.; Baklanov, Mikhaïl (2015)

A novel sensing scheme based on resonance splitting of silicon microrings

Wang, Zhechao; Xing, Yufei; Bogaerts, Wim (2015)

Near/mid-infrared heterogeneous Si photonics

Wang, Zhechao; Malik, Aditya Singh; Tian, Bin; Muneeb, Muhammad; Merckling, Clement; Pantouvaki, Marianna; Shimura, Yosuke; Loo, Roger; Van Campenhout, Joris; Van Thourhout, Dries; Roelkens, Gunther (2015)

Conference contributions: Recent submissions

On-chip hybrid integration of silicon nitride microdisk with colloidal quantum dots ﻿

Nanodome coins for intracellular surface-enhanced raman spectroscopy ﻿

Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs ﻿

The impact of the gate dielectric quality in developing Au-free D-mode and E-mode recessed gate AlGaN/GaN transistors on a 200mm Si substrate ﻿

Selective etch of Si and SiGe for gate-all-around device architecture ﻿

Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance ﻿

Alternative materials for high numerical aperture extreme ultraviolet lithography mask stacks ﻿

Non-contacting busbars for advanced cell structures using low temperature copper ﻿

Strained germanium quantum well p-FinFETs fabricated on 45nm fin pitch using replacement channel, replacement metal gate and germanide-free local interconnect ﻿

Experimental verification of phase induced mask 3D effects in EUV imaging ﻿

High chi block copolymers: a progress report ﻿

Impact of BCP asymmetry on DSA patterning performance ﻿

Direct etched Cu characterization for advanced interconnects ﻿

Impact of time-dependent variability on the yield and performance of 6T SRAM cells in an advanced HK/MG technology ﻿

Characterization and simulation methodology for time-dependent variability in advanced technologies ﻿

Defect-centric perspective of combined BTI and RTN time-dependent variability ﻿

Characterization of time-dependent variability using 32k transistor arrays in advanced HK/MG technology ﻿

Thermal etching of metal thin films using supercritical fluid ﻿

A novel sensing scheme based on resonance splitting of silicon microrings ﻿

Near/mid-infrared heterogeneous Si photonics ﻿