Recently added

Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, Germain; Burbine, Andrew; Torres, J. Andres; Ma, Yuansheng; Granik, Yuri; Krasnova, Polina; Vandenberghe, Geert; Gronheid, Roel; Bekaert, Joost (2014)

Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches

Favia, Paola; Witters, Liesbeth; Mitard, Jerome; Collaert, Nadine; Bender, Hugo (2014)

Design, fabrication and characterization of thin film monocrystalline-silicon solar cells with efficient light trapping

Fave, Alain; Lalouat, Loic; Meng, Xianqin; Gomard, Guillaume; Trompoukis, Christos; El Daif, Ounsi; Depauw, Valerie; Drouard, Emmanuel; Mandorlo, Fabien; Seassal, Christian (2014)

B-field characterization and equivalent circuit modeling of a poly-SiGe-MEMS based xylophone bar magnetometer

Farghaly, Mahmoud; Rochus, Veronique; Rottenberg, Xavier; Mohammed, U.S.; Tilmans, Harrie (2014)

Lateral and vertical scaling impact on statistical performances and reliability of 10nm TiN/Hf(Al)O/Hf/TiN RRAM devices

Fantini, Andrea; Goux, Ludovic; Redolfi, Augusto; Degraeve, Robin; Kar, Gouri Sankar; Chen, Yangyin; Jurczak, Gosia (2014)

Engineering of Hf1-xAlxOy amorphous dielectrics for high-performance RRAM applications

Fantini, Andrea; Goux, Ludovic; Clima, Sergiu; Degraeve, Robin; Redolfi, Augusto; Adelmann, Christoph; Polimeni, Giuseppe; Chen, Yangyin; Komura, Masanori; Belmonte, Attilio; Wouters, Dirk; Jurczak, Gosia (2014)

Study of DID/ID of a single charge trap in UTBOX silicon films

Fang, Wen; Simoen, Eddy; Aoulaiche, Marc; Luo, Jun; Zhao, Chao; Claeys, Cor (2014)

Distinction between silicon and oxide traps using single-trap spectroscopy

Fang, Wen; Simoen, Eddy; Aoulaiche, Marc; Luo, Jun; Zhao, Chao; Claeys, Cor (2014)

A fast triple patterning solution with fix guidance

Fang, Weiping; Arikati, Srini; Celingir, Erdem; Hug, Marco A.; De Bisschop, Peter; Mailfert, Julien; Lucas, Kevin; Gao, Weimin (2014)

A compact physical CD-SEM simulator for IC photolithography modeling applications

Fang, Chao; Smith, Mark D; Vaglio Pret, Alessandro; Biafore, John; Robertson, Steward A; Bekaert, Joost (2014)

Ti as a reactive gate electrode on high-k/p-Ge MOS capacitors

Fadida, Sivan; Nyns, Laura; Lin, Dennis; Van Elshocht, Sven; Caymax, Matty; Eizenberg, Moshe (2014)

Development and evaluation of the Fast Fourier Transform-SSRM technique

Eyben, Pierre; Bisiaux, Pierre; Vandervorst, Wilfried (2014)

NiB Capping of Cu landing pads for thermocompression bonding

England, Luke; Dictus, Dries; De Vos, Joeri; Conard, Thierry; Daily, Robert; Marinissen, Erik Jan (2014)

Impact of stressors in future SiGe-based FinFETs: mobility boost and scalability

Eneman, Geert; Brunco, David; Witters, Liesbeth; Mitard, Jerome; Hikavyy, Andriy; De Keersgieter, An; Roussel, Philippe; Loo, Roger; Veloso, Anabela; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron (2014)

Cu2ZnSiSe4 thin films for photovoltaic applications

ElAnzeery, Hossam; Buffiere, Marie; El Daif, Ounsi; Oueslati, Souhaib; Ben Messaoud, Khaled; Brammertz, Guy; Meuris, Marc; Poortmans, Jef; Guindi, Rafik (2014)

Development of a novel wafer probe for in-situ measurements

El Otell, Ziad; Marinov, Daniil; Samra, Vladimir; Bowden, Mark; de Marneffe, Jean-Francois; Verdonck, Patrick; Braithwaite, Nicholas (2014)

MBE studies for In0.53Ga0.47As growth using strained buffer layers and in-situ high-k gate passivation

El Kazzi, Salim; Hsu, Mark; Ezzedini, Maher; Merckling, Clement (2014)

Fabrication and thermal tolerant all-silicon wavelength filtering devices

Dwivedi, Sarvagya Paavan; D'heer, Herbert; Bogaerts, Wim (2014)

Fabrication tolerant silicon MZI filter

Dwivedi, Sarvagya Paavan; D'heer, Herbert; Bogaerts, Wim (2014)

Semi-additive Cu-Polymer RDL process for interposers applications

Duval, Fabrice; Detalle, Mikael; Sun, Xiao; Beyne, Eric; Roda Neve, Cesar; Velenis, Dimitrios (2014)

Conference contributions: Recent submissions

Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology ﻿

Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches ﻿

Design, fabrication and characterization of thin film monocrystalline-silicon solar cells with efficient light trapping ﻿

B-field characterization and equivalent circuit modeling of a poly-SiGe-MEMS based xylophone bar magnetometer ﻿

Lateral and vertical scaling impact on statistical performances and reliability of 10nm TiN/Hf(Al)O/Hf/TiN RRAM devices ﻿

Engineering of Hf1-xAlxOy amorphous dielectrics for high-performance RRAM applications ﻿

Study of DID/ID of a single charge trap in UTBOX silicon films ﻿

Distinction between silicon and oxide traps using single-trap spectroscopy ﻿

A fast triple patterning solution with fix guidance ﻿

A compact physical CD-SEM simulator for IC photolithography modeling applications ﻿

Ti as a reactive gate electrode on high-k/p-Ge MOS capacitors ﻿

Development and evaluation of the Fast Fourier Transform-SSRM technique ﻿

NiB Capping of Cu landing pads for thermocompression bonding ﻿

Impact of stressors in future SiGe-based FinFETs: mobility boost and scalability ﻿

Cu2ZnSiSe4 thin films for photovoltaic applications ﻿

Development of a novel wafer probe for in-situ measurements ﻿

MBE studies for In0.53Ga0.47As growth using strained buffer layers and in-situ high-k gate passivation ﻿

Fabrication and thermal tolerant all-silicon wavelength filtering devices ﻿

Fabrication tolerant silicon MZI filter ﻿

Semi-additive Cu-Polymer RDL process for interposers applications ﻿