EISBN
978-1-5106-4978-1
ISBN
978-1-5106-4977-4
ISSN
0277-786X
Conference
Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference
Journal
Proceedings of SPIE
Volume
12051
Title
Evaluation of Ta-Co alloys as novel high-k EUV mask absorber
Publication type
Proceedings paper