Authors

Pollentier, Ivan; Holzmeier, Fabian; Dorney, Kevin; Suh, Hyo Seon

DOI

10.1117/12.3034708

EISBN

978-1-5106-8156-9

ISBN

978-1-5106-8155-2

ISSN

0277-786X

Conference

2024 International Conference on Extreme Ultraviolet Lithography

Journal

Proceedings of SPIE

Volume

13215

Title

BEFORCE: a pathway to unravel metal oxide resist (MOR) reactions upon EUV exposure, bake, and environment

Publication type

Proceedings paper