Browsing Articles by author "Pacco, Antoine"
Now showing items 1-17 of 17
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Controlled cobalt recess for advanced interconnect metallization
Pacco, Antoine; Akanishi, Yuya; Le, Quoc Toan; Kesters, Els; Murdoch, Gayle; Holsteyns, Frank (2019) -
Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Saidov, Khakimjon; Erofeev, Ivan; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Hartanto, Antony Winata; Chen, Yifan; Yan, Hongwei; Tjiu, Weng Weei; Holsteyns, Frank; Mirsaidov, Utkur (2024) -
Controlling the Wet-Etch Directionality in Nanostructured Silicon
Aabdin, Zainul; Ghosh, Tanmay; Pacco, Antoine; Raj, Sanoj; Do, Hue Thi Bich; Saidov, Khakimjon; Weei, Tjiu Weng; Anand, Utkarsh; Kral, Petr; Holsteyns, Frank; Bosman, Michel; Mirsaidov, Utkur (2022) -
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Pacco, Antoine; Wada, Masayuki; Bearda, Twan; Mertens, Paul (2009) -
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Pacco, Antoine; Nakano, Teppei; Iwahata, Shota; Iwasaki, Akihisa; Altamirano Sanchez, Efrain (2023) -
Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers
Wan, Danny; Couet, Sebastien; Piao, Xiaoyu; Souriau, Laurent; Canvel, Yann; Tsvetanova, Diana; Vangoidsenhoven, Diziana; Thiam, Arame; Pacco, Antoine; Potocnik, Anton; Mongillo, Massimo; Ivanov, Tsvetan; Jussot, Julien; Verjauw, Jeroen; Acharya, Rohith; Lazzarino, Frederic; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields
Camerotto, Elisabeth; Brems, Steven; Hauptmann, Marc; Pacco, Antoine; Struyf, Herbert; Mertens, Paul; De Gendt, Stefan (2012) -
Investigation of Microwave Loss Induced by Oxide Regrowth in High-Q Niobium Resonators
Verjauw, Jeroen; Potocnik, Anton; Mongillo, Massimo; Acharya, Rohith; Mohiyaddin, Fahd Ayyalil; Simion, George; Pacco, Antoine; Ivanov, Tsvetan; Wan, Danny; Vanleenhove, Anja; Souriau, Laurent; Jussot, Julien; Thiam, Arame; Swerts, Johan; Piao, Xiaoyu; Couet, Sebastien; Heyns, Marc; Govoreanu, Bogdan; Radu, Iuliana (2021) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2009) -
Nanoparticle removal with megasonics: A review
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Kim, Tae-Gon; Xu, XiuMei; Wostyn, Kurt; Mertens, Paul; De Gendt, Stefan (2014) -
Non-destructive characterization of extended crystalline defects in confined semiconductor device structures
Schulze, Andreas; Strakos, Libor; Vystavel, Tomas; Loo, Roger; Pacco, Antoine; Collaert, Nadine; Vandervorst, Wilfried; Caymax, Matty (2018) -
Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants
Pacco, Antoine; Tao, Zheng; Rip, Jens; van Dorp, Dennis; Philipsen, Harold; Holsteyns, Frank (2019) -
Selective wet-etching of silicon germanium in composite vertical nanowires
Baraissov, Zhaslan; Pacco, Antoine; Koneti, Siddardha; Bisht, Geeta; Panciera, Federico; Holsteyns, Frank; Mirsaidov, Utkur (2019) -
Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Erofeev, Ivan; Hartanto, Antony Winata; Saidov, Khakimjon; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Tjiu, Weng Weei; Hui, Hui Kim; Holsteyns, Frank; Mirsaidov, Utkur (2024) -
The influence of dissolved carbon dioxide on cavitation intensity in ultrasound cleaning systems
Brems, Steven; Hauptmann, Marc; Camerotto, Elisabeth; Pacco, Antoine; Struyf, Herbert; Mertens, Paul; Gottschalk, Christiane; De Gendt, Stefan (2013) -
Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept
Abrenica, Graniel; Lebedev, Mikhail; Pacco, Antoine; Calvet, Wolfram; Mayer, Thomas; van Dorp, Dennis (2019) -
Will cleaning technologies break through the red brick wall?
Pacco, Antoine; Kim, Tae-Gon; Mertens, Paul (2009-10)