Browsing Articles by imec author "6ecdf26eec22e17d1770ee63c65e852686ecb14e"
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Air-gap formation by UV-assisted decomposition of CVD material
Pantouvaki, Marianna; Humbert, Aurelie; Van Besien, Els; Camerotto, Elisabeth; Travaly, Youssef; Richard, Olivier; Willegems, Myriam; Volders, Henny; Kellens, Kristof; Daamen, Roel; Hoofman, Romano; Beyer, Gerald (2008) -
Chemisorption of ALD precursors in and on porous low-k films
Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Farrell, Leo; Baklanov, Mikhaïl; Tielens, Hilde; Van Besien, Els; Witters, Thomas; Nyns, Laura; Van Elshocht, Sven (2013) -
Dielectric reliability of 70 nm pitch air-gap interconnect structures
Pantouvaki, Marianna; Sebaai, Farid; Kellens, Kristof; Goossens, Danny; Vereecke, Bart; Versluijs, Janko; Van Besien, Els; Caluwaerts, Rudy; Marrant, Koen; Bender, Hugo; Moussa, Alain; Struyf, Herbert; Beyer, Gerald (2011) -
Effect of porogen residue on electrical characteristics of ultra low-k materials
Baklanov, Mikhaïl; Zhao, Larry; Van Besien, Els; Pantouvaki, Marianna (2011) -
Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics
Urbanowicz, Adam; Vanstreels, Kris; Verdonck, Patrick; Van Besien, Els; Trompoukis, Christos; Shamiryan, Denis; De Gendt, Stefan; Baklanov, Mikhaïl (2011) -
Electrical characteristics of P-type bulk Si fin field-effect transistor using solid-source doping with 1-nm phosphosilicate glass
Kikuchi, Yoshiaki; Chiarella, Thomas; De Roest, David; Blanquart, Timothee; De Keersgieter, An; Kenis, Karine; Peter, Antony; Ong, Patrick; Van Besien, Els; Tao, Zheng; Kim, Min-Soo; Kubicek, Stefan; Chew, Soon Aik; Schram, Tom; Demuynck, Steven; Mocuta, Anda; Mocuta, Dan; Horiguchi, Naoto (2016) -
Epitaxial diamond-hexagonal silicon nano-ribbon growth on (001) silicon
Qiu, Yang; Bender, Hugo; Richard, Olivier; Kim, Min-Soo; Van Besien, Els; Vos, Ingrid; de Potter de ten Broeck, Muriel; Mocuta, Dan; Vandervorst, Wilfried (2015) -
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Zhao, Larry; Lofrano, Melina; Croes, Kristof; Van Besien, Els; Tokei, Zsolt; Wilson, Chris; Degraeve, Robin; Kauerauf, Thomas; Beyer, Gerald; Claeys, Cor (2011) -
Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's
Li, Yunlong; Oba, Yoshiyuki; Wu, Chen; Van Huylenbroeck, Stefaan; Van Besien, Els; Vereecke, Guy; Stucchi, Michele; De Wolf, Ingrid; Beyer, Gerald; Beyne, Eric; Croes, Kristof (2014) -
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2013) -
Influence of porosity on electrical properties of low-k dielectrics
Van Besien, Els; Pantouvaki, Marianna; Zhao, Larry; De Roest, David; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2012) -
Influence of the ion bombardment of O2 plasmas on low-k materials
Verdonck, Patrick; Samara, Vladimir; Goodyear, Alec; Ferchichi, Abdelkarim; Van Besien, Els; Baklanov, Mikhaïl; Braithwaite, Nicholas (2011) -
Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials
Verdonck, Patrick; Van Besien, Els; Vanstreels, Kris; Trompoukis, Christos; Urbanowicz, Adam; De Roest, David; Baklanov, Mikhaïl (2011) -
Influence of varying porogen loads and different UV cures on low-k film characteristics
Farrel, Leo; Verdonck, Patrick; Van Besien, Els; Ciofi, Ivan; Borrello, Gianpaolo; Vanstreels, Kris; Mardani, Shabnam; Baklanov, Mikhaïl (2011) -
Interface charge trapping induced flatBand voltage shift during plasma-enhanced atomic layer deposition in through silicon via
Li, Yunlong; Suhard, Samuel; Van Huylenbroeck, Stefaan; Meersschaut, Johan; Van Besien, Els; Stucchi, Michele; Croes, Kristof; Beyer, Gerald; Beyne, Eric (2017) -
Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Van Besien, Els; Singh, Arjun; Barbarin, Yohan; Verdonck, Patrick; Dekkers, Harold; Vanstreels, Kris; de Marneffe, Jean-Francois; Baklanov, Mikhaïl; Van Elshocht, Sven (2014) -
Reliability challenges for barrier/liner system in high aspect ratio through silicon vias
Li, Yunlong; Van Huylenbroeck, Stefaan; Van Besien, Els; Shi, Xiaoping; Wu, Chen; Stucchi, Michele; Beyer, Gerald; Beyne, Eric; De Wolf, Ingrid; Croes, Kristof (2014) -
Scalability of RuTiN barriers deposited by plasma-enhanced atomic layer deposition for advanced interconnects
Swerts, Johan; Siew, Yong Kong; Van Besien, Els; Barbarin, Yohan; Opsomer, Karl; Boemmels, Juergen; Tokei, Zsolt; Van Elshocht, Sven (2014) -
Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes
Kumaresan, Vishnuvarthan; Wilson, Chris; Verdonck, Patrick; Van Besien, Els; Lazzarino, Frederic; Truffert, Vincent; Boemmels, Juergen; Tokei, Zsolt; Wong, T.K.S. (2014) -
Study of metal barrier deposition-induced damage to porous low-k materials
Zhao, Larry; Volders, Henny; Baklanov, Mikhaïl; Tokei, Zsolt; Pantouvaki, Marianna; Wilson, Chris; Van Besien, Els; Beyer, Gerald; Claeys, Cor (2011)