Browsing Articles by imec author "e576afbf43add4095143c6322cedb3ccde8f2762"
Now showing items 21-40 of 274
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Boosting the on-current of a n-channel nanowire tunnel field-effect transistor by source material optimization
Verhulst, Anne; Vandenberghe, William; Maex, Karen; Groeseneken, Guido (2008) -
CAD-oriented semi analytic approach for capacitance matrix computation of multilayer VLSI interconnects
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen (2002) -
Carbon nanotube catalysis by metal silicide: resolving inhibition versus growth
Esconjauregui, Santiago Cruz; Whelan, Caroline; Maex, Karen (2007) -
Challenges for structural stability of ultra-low-k based interconnects
Iacopi, Francesca; Brongersma, Sywert; Vandevelde, Bart; Travaly, Youssef; Maex, Karen (2004) -
Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Das, Arabinda; Kokubo, Terukazu; Furukawa, Yukiko; Struyf, Herbert; Vos, Ingrid; Sijmus, Bram; Iacopi, Francesca; Van Aelst, Joke; Le, Quoc Toan; Carbonell, Laure; Brongersma, Sywert; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Sleeckx, Erik; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Rosseel, Erik; Van Hove, Marleen; Vanhaelemeersch, Serge; Shiota, A.; Maex, Karen (2002) -
Characterisation of HF-last cleaning of ion-implanted Si surfaces
Kondoh, Eiichi; Baklanov, Mikhaïl; Jonckx, Franky; Maex, Karen (1998) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Travaly, Youssef; Schuhmacher, J.; Martin Hoyas, Ana; Abell, T.; Sutcliffe, Vic; Jonas, M.; Van Hove, Marleen; Maex, Karen (2005) -
Characterization of Cu surface cleaning by hydrogen plasma
Baklanov, Mikhaïl; Shamiryan, Denis; Tokei, Zsolt; Beyer, Gerald; Conard, Thierry; Vanhaelemeersch, Serge; Maex, Karen (2001) -
Characterization of molecular sieve coating using ellipsometric porosimetry
Eslava Fernandez, Salvador; Baklanov, Mikhaïl; Kirschhock, Christine E. A.; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan A. (2008) -
Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers
Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Brongersma, Sywert; Vanhaeren, Danielle; Maex, Karen (2003) -
Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions
Eslava Fernandez, Salvador; Kirschhock, Christine E. A.; Aldea, Steliana; Baklanov, Mikhaïl; Iacopi, Francesca; Maex, Karen; Martens, Johan A. (2009) -
Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
Steegen, An; De Wolf, Ingrid; Maex, Karen (1999) -
Characterization of WF6/N2/H2 plasma enhanced chemical vapor deposited WxN films as barriers for Cu metallization
Li, Hua; Jin, S.; Bender, Hugo; Lanckmans, Filip; Heyvaert, Ilse; Maex, Karen; Froyen, L. (2000) -
Chemical and electrical characterization of the interaction of BCl 3/Cl2 etching and CF4/H2O stripping plasmas with aluminum surfaces
Proost, Joris; Li, H.; Conard, Thierry; Boullart, Werner; Maex, Karen (1999) -
Co silicide formation on SiGeC/Si and SiGe/Si layers
Donaton, R. A.; Maex, Karen; Vantomme, Andre; Langouche, G.; Morciaux, Y.; St. Amour, A.; Sturm, J. C. (1997) -
Comment on "MEL-type pure-silica zeolite nanocrystals prepared by an evaporation-assisted two-stage synthesis method as ultra-low-k materials"
Eslava, Salvador; Seo, Jin W.; Kirschhock, Christine; Baklanov, Mikhaïl; Maex, Karen; Martens, Johan (2010) -
Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies
Lauwers, A.; Besser, Paul; Gutt, T.; Satta, Alessandra; de Potter de ten Broeck, Muriel; Lindsay, Richard; Roelandts, Nico; Loosen, Fred; Jin, S.; Bender, Hugo; Stucchi, Michele; Vrancken, Evi; Deweerdt, Bruno; Maex, Karen (2000) -
Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
Shamiryan, Denis; Weidner, K.; Gray, W.D.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002) -
Comparative study of SiOCH low-k films with varied porosity interacting with etching and cleaning plasma
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002)