Browsing Presentations by author "Carbonell, Laure"
Now showing items 1-9 of 9
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A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
Continued scalability of copper/low-k interconnects
Brongersma, Sywert; Carbonell, Laure; Vanstreels, Kris; Iacopi, Francesca; D'Haen, Jan; Zhang, Wenqi; Travaly, Youssef; Demuynck, Steven; Tokei, Zsolt; De Ceuninck, Ward; Maex, Karen (2005) -
Defect inspection of Cu metallization
Holsteyns, Frank; Carbonell, Laure; Vos, Ingrid; Vrancken, Evi; Tokei, Zsolt; Mertens, Paul (2002) -
Electromigration study of ultra narrow copper lines in low-k dielectric
Croes, Kristof; Moon, Kwang Jin; Carbonell, Laure; Struyf, Herbert; Heylen, Nancy; Tokei, Zsolt; Beyer, Gerald (2007) -
Filling of 80 nm structures using a novel copper oxide reduction and reflow approach
Carbonell, Laure; Palmans, Roger; Travaly, Youssef; Brongersma, Sywert; Maex, Karen (2004) -
Integration of 50 nm half pitch single damascene copper trenches in BDII by means of double patterning 193 nm immersion lithography on metal hardmask
Van Olmen, Jan; Al-Bayati, A; Beyer, Gerald; Boelen, Pieter; Carbonell, Laure; Zhao, Chao; Ciofi, Ivan; Claes, Martine; Cockburn, Andrew; Druais, Gael; Hendrickx, Dirk; Heylen, Nancy; Kesters, Els; Lytle, S.; Noori, A.; Op de Beeck, Maaike; Struyf, Herbert; Tokei, Zsolt; Versluijs, Janko (2007) -
Metallization options for sub- 30 nm interconnects: comparison of Cu and W metallizations
Carbonell, Laure; Caluwaerts, Rudy; Volders, Henny; Heylen, Nancy; Kellens, Kristof; Mertens, Sofie; Van Ammel, Annemie; Van Roey, Frieda; Cockburn, Andrew; Gravey, Virgine; Shah, Kavita; Rajagopalan, Ravi; Tokei, Zsolt; Beyer, Gerald (2010) -
Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines
Carbonell, Laure; Volders, Henny; Haider, A.; Heylen, Nancy; Richard, Olivier; Palmans, Roger; Travaly, Youssef; Tokei, Zsolt; Boelen, Pieter; Rosenfeld, A.; Mandrekar, T.; Hernandez, Jose Luis; Vanhaelemeersch, Serge (2007) -
The thickness and temperature dependent resistivity of thin copper films
Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Wu, Wen; Vervoort, Iwan; Palmans, Roger; Hoflijk, Ilse; Bender, Hugo; Hui, W.; Carbonell, Laure; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen (2003)