Browsing Presentations by imec author "52cc7896521818ae13b724b6f5806bbe72f80dbd"
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(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
Advanced front-end processes for the 45nm CMOS technology node
Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J. (2004) -
Conformal doping for FINFET's: a fabrication and metrology challenge
Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008) -
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Rooyackers, Rita; Augendre, Emmanuel; Degroote, Bart; Collaert, Nadine; Nackaerts, Axel; Dixit, Abhisek; Vandeweyer, Tom; Pawlak, Bartek; Ercken, Monique; Kunnen, Eddy; Dilliway, Gabriela; Leys, Frederik; Loo, Roger; Jurczak, Gosia; Biesemans, Serge (2007) -
Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations
Camillo-Castillo, Renata; Law, M.E.; Lindsay, Richard; Maex, Karen; Pawlak, Bartek; McCoy, S. (2005) -
Ge-migration in s-Si-SiGe structures during implantation and annealing
Vandervorst, Wilfried; Janssens, Tom; Geenen, Luc; Loo, Roger; Caymax, Matty; Delhougne, Romain; Pawlak, Bartek; Ravit, Claire (2005) -
Integration challenges of SPER junctions for the 45 nm technology node
Severi, Simone; Richard, Lindsay; Henson, Kirklen; Pawlak, Bartek; Satta, Alessandra; Duffy, Ray; Surdeanu, Radu (2004) -
Integration of SPER and FUSI in a pFET
Severi, Simone; Pawlak, Bartek; Veloso, Anabela; Duffy, Ray; Kottantharayil, Anil; Lauwers, Anne; Henson, Kirklen; de Marneffe, Jean-Francois; Eyben, Pierre; Vandervorst, Wilfried; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2004) -
On the sensitivity of carrier illumination to processing steps
Vandervorst, Wilfried; Clarysse, Trudo; Pawlak, Bartek; Budiarto, E.; Borden, Peter (2003) -
Ultra-shallow junction process development for the 45nm CMOS technology node using co-implantation
Collart, E.J.H.; Kirkwood, D.; Lindsay, Richard; Vandervorst, Wilfried; Pawlak, Bartek (2004)